Modular Type Lubricator Series AL

54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

10

Mounting bolt X T MM L H D B RB08-X331 RB10-X331 RB14-X331 RB20-X331 RB27-X331 15 4.5 drill, 8 counterbore depth 4.4 32 M8 x 1.0 10 20 M4 7.5 5.5 drill, 9.5 counterbore depth 5.4 19 40 M10 x 1.0 12 25 M5 9.5 9 drill, 14 counterbore depth 8.6 25 54 M14 x 1.5 16 34 M8 12.5 11 drill, 17.5 counterbore depth 10.8 38 70 M20 x 1.5 22 44 M10 19 13.5 drill, 20 counterbore depth 13 50 80 M27 x 1.5

Bore Size: 16mm, Port Thread: Rc, Stroke: 40mm

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 16, Stroke(mm): 40, Max.

KK/KK13

45 -02MS 54.7 9 1/4 25.4 50 40.4 48.1 R 3/8 47.2 43.5 -03MS 53.7 11 49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

S Couplers Series KK/KK13

48.7 45 -02MS 54.7 9 1/4 25.4 50 40.4 48.1 R 3/8 47.2 43.5 -03MS 53.7 11 49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

VCA

48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Information

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

CYP

Sine cushion Stroke adjustment screw Stroke adjustment The stroke adjustment screw allows fine control of the stroke (1mm on each side) Variations High Series CYP Clean environment level Series 12Standard products Load weight Light Low Heavy Bore size (mm) Series Guide type 6 10 15 20 25 32 40 50 63 Clean room rodless CYP High precision guide 12-CY1B Basic type Basic type Direct mount type

CYPSeries

E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

CYPSeries

E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

VDW

PA PAX PB Flow Characteristics Water Air Orifice size (mm ) Port size Av x 10-6 m2 12 (INN.C.) 13 (INN.O.) 12 (INN.C.) 13 (INN.O.) Model C [dm3/(sbar)] C [dm3/(sbar)] Av x 10-6 m2 Cv converted Cv converted b Cv b Cv N.O.

3 Port Solenoid Valve

SS070A-80A-6 Stopper plate Stainless steel 10 < Barb Fitting Assembly > 0 Barb fitting assembly (for cylinder port) SS070A013A SS07050A 32 Port size Applicable tube 3.18/2 Applicable tube 4/2.5 32 40 Note) Order is accepted in 10 units.

NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

COQ2BP

Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 1 Safe ~~n~ .-. 40 . .. lao :!20 g . .. . ~er ~ Zone 10 Distance From Auto Switch Top Face 0 5000 10 15000 20 Welding Current CAl .. ... i1 SO >. . /" /. 40 Sai. Zone ..

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2