Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Weightkg/ Top mounting Series LEG25M LEG32M LEG40M Strokemm 30 50 100 30 50 100 30 50 100 Product weightkg 2.9 3.1 3.6 5.3 5.7 7.1 6.4 7.0 8.5 Additional weight with lock/Coverkg 0.3 0.6 0.6 Weightkg/ In-line Series LEG25MD LEG32MD LEG40MD Strokemm 30 50 100 30 50 100 30 50 100 Product weightkg 2.8 3.0 3.5 5.0 5.5 6.9 6.2 6.7 8.2 0.3 0.6 0.6 Additional weight with lock/Coverkg -5- 1.3 Construction

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulator) 2.35 mm Min. bending radius (Fixed) 110 mm Power Supply Cable/Gateway Decentralized System (64 Points) For DeviceNet For PROFIBUS DP @6@7EX500-AP 050 S Connector specification Cable length (L) Angle connector type 010 1000 mm 050 5000 mm S Straight A Angle M12 14.9 Straight connector type 14.9 1 M12 6 6 5 1 2 2 28.3 5 4 3 4 3 30 5 50 L 25.3 30 5 50 40.7 27 Socket connector

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Modular Type Regulators Series AR

25 28 40 2 18 18.5 44 5.4 15.4 34 30 55 2.3 25 28.5 14 6 AG 15.4 34 44 5.4 30 55 2.3 26 32.5 16 6 8 6.5 41 40 46 53 2.3 31 38.5 19 7 AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

40 30 20 10 Step 1 Check the speedwork load.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

, when both fingers and attachments are in full contact with the workpiece as shown in the figure below. 50 50 Pressure Pressure 0.6 MPa 0.6 MPa 40 40 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

MXH

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55 89 6 25 25 60 60 30 30

KK/KK13

6 19 51 35.9 41.3 R 1/4 48.7 45 -02MS 54.7 9 1/4 25.4 50 40.4 48.1 R 3/8 47.2 43.5 -03MS 53.7 11 49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

K35-OMW0031

30 Caution 1.

Refrigerated Air Dryer

AM AMD Data A: Inlet Air Temperature Data B: Ambient Temperature AMH Inlet air temperature (C) Inlet air temperature (C) Ambient temperature (C) Ambient temperature (C) Correction factor Correction factor Correction factor Correction factor IDFA3E to 11E IDFA15E1 to 75E IDFA3E to 37E 1.33 IDFA55E to 75E IDFA100F to 150F IDFA100F to 150F AME 20 25 30 35 40 5 to 25 30 35 40 45 50 5 to 30 35

Low Profile Slide Table Series MXF

F A A Lr MXF8 Lr = 20 mm 0.08 0.04 0.03 MXF8-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXF8-30 0.06 MXF8-10 MXF8-20 MXF8-30 0.03 0.02 MXF8-20 0.04 0.02 MXF8-20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 MXF12-50 0.06 Table displacement amount (mm) Table displacement

LEC-OM036xx

Start flag 0: no send Numerical data input 2 1: send 1 Step data No 0 to 63 Data writting 3 Operation Note) 1 1: Absolute 2: Relative 4 H 5 L Speed 2 0 to 65500 mm/s 6 3 7 2 Position 4 +/-2147483647 0.01mm 8 1 9 0 ID1 Numerical 10 H 11 L Acceleration 2 0 to 65500 mm/s2 data input 12 H 13 L Deceleration 2 0 to 65500 mm/s2 Data writting 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

I/O Configurator (NFC version)

Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4. Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4.

EX500-GPR1A.eng

Confirm that the connector portion does not move. 14.9 Gray: Ground Black: DC24V 10% ( power supply for input and control ) Blue: 0V ( for input and control ) White: DC24V+10%/-5% ( for solenoid valves/output ) 18 48 34 Straight connector Type Angle connector Type EX500-AP -S EX500-AP -A 6 30 5 50 31.3 28.3 6 Socket Connector Pin Layout 4 3 1 5 30 5 50 2 B. Single power supply system A.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port) W X Y ZZ Model Mounting Nut

Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.