DOC1020530

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

DOC1003626

+ Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig.2-2 Circuit diagram 2.2 Communication specification HRS400-A-46 2-4 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.3 Contact input

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Heavy Duty Stopper Cylinder Series RSH/RS1H

24.5 17 24.5 9.5 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Soft Start-up Valve AV2000/3000/4000/5000 1

29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5

PFxx-OMP0001CN

] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2] 36 [1000] 1000 L/min(PFMB7202) [ 25] 25 L/min(PFMB7501) 2 [H_2] OUT2 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [F 3][rES] [rES] [1.00] 1 41 [F10][FLo] [FLo] [inS] 42 [F13][rEv] [rEv] [oFF] 43 [F20][inP] [inP] 3 [rAC

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 25mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 20mm, Thread: TN (NPT), Symmetric Type: Standard Type, Stroke: 100mm

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: -, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 25mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: -, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 20mm, Thread: NPT, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: -, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: 22 [Vacuum Suction Type (Copper, Fluorine & Silicon-free + Low Particle Generation)], Magnet: Built-in, Mounting: Basic Style, Bore Size: 25mm, Port Thread: Rc, Stroke: 100mm, Cushion: -, Rod End Thread: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Speed Controller with One-touch Fittings

21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 22.8 12 20.5 4.3 8 19.3 22 25 12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

Compressed Air Preparation Filter

. *5 If the compressor is small (0.75 kW, discharge flow is less than 100 L/min (ANR)), air leakage from the drain cock may occur during the start of operations.

Copper-free Actuators

Air Cylinder Bore size (mm) Name of CAD file Series Application Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Compact cylinder Series CQ2 2.3-2 20-CQ2 Standard 2.3-108 20-CQ2 Standard long stroke (Note 1, 3) SCQ2l 2.3-22 20-CQ2W Double rod 2.3-56 20-CQ2K Non-rotating rod 2.3-118 20-CQ2lS Anti-lateral load Compact cylinder with

α PneuAlpha HARDWARE MANUAL

Hardware Specication 2.1 Available Models PneuAlpha Hardware Specification 2 ECC-PNAL-20MT-D 12 TRANSISTOR 8 ECC-PNAL-10MT-D 6 TRANSISTOR 4 (0.70)* ECC-PNAL-20MR-D ECC-PNAL-20MR-A 100 240V AC~ 100 240V AC~ 12 RELAY 8 124.6 x 90 x 55 ECC-PNAL-10MR-D ECC-PNAL-10MR-A 6 RELAY 4 ECC-PNAL-6MR-A 100 240V AC~ 100 240V AC~ 4 RELAY 2 71.2 x 90 x 55 Model Power Supply * Without Special Connection Modules