Clean Series: 22 (Copper, Flourine & Silicon-Free+Low Particle Generation), Bore Size: 16mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: 1 (Wide Opening), Auto Switch: M9PW (Solid State, 2-color Indication, 3 Wire PNP, Horizontal), Lead Wire: M (1m)

Clean Series: 22 (Copper, Flourine & Silicon-Free+Low Particle Generation), Bore Size: 10mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: Standard, Auto Switch: M9PW (Solid State, 2-color Indication, 3 Wire PNP, Horizontal), Lead Wire: Z (5m)

Clean Series: 22 (Copper, Flourine & Silicon-Free+Low Particle Generation), Bore Size: 20mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: 1 (Wide Opening), Auto Switch: M9PW (Solid State, 2-color Indication, 3 Wire PNP, Horizontal), Lead Wire: Z (5m)

Clean Series: 22 (Copper, Flourine & Silicon-Free+Low Particle Generation), Bore Size: 10mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: Standard, Auto Switch: M9PW (Solid State, 2-color Indication, 3 Wire PNP, Horizontal), Lead Wire: L (3m)

Stroke Adjustment Mechanism: Not Provided, Cylinder internal diameter(mm): 32, Auto switch: M9PW, Number Of Switches: 2 pcs., Lead wire length: 0.5 m, Made to order specifications: None, Connector type for gripper opening/closing: M12 4-pin, Port thread type: M

, Number Of Switches: 2 pcs., Lead wire length: 1 m, Stroke(mm): 32, Made to order specifications: With adjuster for finger opening/closing width adjustment, Connector type for gripper opening/closing: None, Stroke adjustment width(mm): 22

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Symmetric Type, Stroke: 20mm, Adjuster: Metal Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Symmetric Type, Stroke: 30mm, Adjuster: Metal Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: -, Number: -

Compact

200 0.3/0.4 100 0.3/0.39 150 100 50 50 0 0 0 20 40 60 0 20 40 60 Allowable overhang L [mm] Allowable overhang L [mm] Pressing force in the dotted line ranges are reference values as the pressing force may vary in these ranges. 12 MXZ Series For Stopper (1) Confirm that the stopper jig weight and overhang are within the allowable range as shown in the graphs for transfer.

High purity fluororesin fitting , Space saving and tube connector type, Maximum operating pressure: 0.7MPa , Fluid temperature: 0 to 150 C , Variety of size combinations available LQ FITTING. FITTING, HIGH PURITY,TUBE CONN. CONNECTORS. LQ. .18717 lb. 22.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Steam Valve

Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22

3 Port Air Operated Valve

VZA VTA VPA342 VPA542 VGA VPA VPA 21.5 28 VPA3 15 22 1563 3 Port/Air Operated Valve Base Mounted/Single Unit VPA300/500/700 Series How to Order VPA 3 4 4 1 01 A Series 3 5 7 VPA300 series Type of actuation A B N.C. (Normally closed) N.O.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

condensation or freezing) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Standards UL/CSA (E216656), CE, RoHS Port size Rc1/4, NPT1/4, G1/4 Piping Materials of parts in contact with fluid Sensor pressure receiving area: Silicon Piping port: C3604 (Electroless nickel plating), O-ring: HNBR Port size Rc1/4 153 g Weight Body Port size NPT1/4 152 g Port size G1/4 150

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR ITV IC ITVX Recommended Tightening Torque PVQ Unit: Nm Connection thread 1/2 3/8 1/4 1/8 VEF VEP Torque 28 to 30 22 to 24 12 to 14 7 to 9 VER 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF ITV IC ITVH Recommended Tightening Torque ITVX Unit: Nm Connection thread 1/2 3/8 1/4 1/8 PVQ Torque 28 to 30 22 to 24 12 to 14 7 to 9 VY1 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

10 to 50C35 to 85%RH (with no condensation)1500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)98 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)120 g

10 to 50C35 to 85%RH (with no condensation)1500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)98 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)120 g