Vacuum Unit

) Individual exhaust port6 10.4 Common supply (PV) port Metric size: 2 x 8 Inch size: 2 x 5/16" Pilot pressure exhaust port M3 1 82.9 (Ejector system) 87.9 (Vacuum pump system) Vacuum break flow adjusting needle Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16) 26.4 54.8 2 x Common supply (PD) port4 2.6 PS and PD port dimensions1, 4 For high-noise reduction silencer exhaust 62 53

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

C85

G1 8 8 to 25 HR N1 N1 Rail mounting type (A) Band mounting type (B) or non-magnet S + Stroke ZZ + 2 x Stroke Wh KK With rod boot C e K 9 9 I f AM h (mm) ND h8 BE KK EE N1 G1 KW NA D F KV HR K ZZ Bore C AM WA SW S WB H WH 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 19 6 28 16 7 7 11.5 48{54} 104{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 4.5 19 6 10.5 28 16 7 48(53

CQS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional Weight (g) Bore size (mm) 12 25 16 20 1.5 12 3 6 Male thread Nut Rod end male thread 1 8 2 4 Rubber bumper (No need to add for long stroke) 0 3 1 2 55(53) 181(172) 65(61) 159(153) Foot style (Including mounting bolt) 58(56) 180(171) 70(66)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

end lock Head end lock O P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53

MGQ

77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL Bearing type 10 21 27 34 38 20 18 22 28 30 51 55 70 71 25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412

Floating Joint

30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black D0.5 9 10 10 Lead wire length (m) 3 50 53 53 205 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw Mounting screw M2.5 x 4l Slotted set screw OUT Black Indicator

53

Circulating Fluid Temperature Controller Thermo-chiller HRSH090 Series Inverter Type Power consumption reduced by 53% * HRS (Only 400 VAC type) (UL Standard) HRS 090 Outstanding energy saving effect with the triple inverter! RoHS HRS 100/150 HRSH 090 HRSH 090 Non-inverter chiller 5.1 kW DC inverter compressor 1. DC inverter compressor 1.

Environment

LEC Y Motorless Overhang Displacement Due to Table Clearance (Reference Value) LAT Basic type High precision type LZ 0.12 0.25 LC3F2 LEF16 LEF16 0.1 0.2 Displacement [mm] Displacement [mm] 0.08 LEF25 LEF25 0.15 0.06 0.1 0.04 LEF40 LEF40 0.05 0.02 LEF32 LEF32 0 0 0 100 200 300 0 100 200 300 Overhang distance [mm] Overhang distance [mm] 53 AC Servo Motor Electric Actuator/Slider Type Belt Drive

EXxx-OMW0014CN

No.EX-OMW0014CN-A PROFINET SI / / EX245-SPN1A/2A/3A(SI ) EX245-DX1() EX245-DY1() EX245-LA1/LB1(IO-Link ) EX245-EA2-() 1. 11 1.1. 11 1.2. 12 2. 13 3. 14 3.1. 14 3.2. 16 4. 22 4.1. 22 4.2. 26 5. 30 5.1. 30 5.2. 34 6.SI 35 6.1. 35 6.2. 37 6.3. 39 6.4.LED 40 6.5. 43 7.EX245-DX1 46 7.1. 46 7.2. 47 7.3. 48 7.4. 48 7.5 LED 49 7.6. 50 8.EX245-DY1 51 8.1. 51 8.2. 52 8.3. 53 8.4. 53 8.5.LED

EXxx-OMU0020CN

EX245-DX1 . 51 7.1. . 51 7.2. . 52 7.3. . 53 7.4. . 53 7.5. LED . 54 7.6. . 55 8. EX245-DY1 . 56 8.1. . 56 2 No.EX-OMU0020CN 8.2. . 57 8.3. . 58 8.4. . 58 8.5. LED . 59 8.6. . 60 9. EX245-EA2-1/2 . 61 9.1. . 61 9.2. . 62 10. . 63 10.1. . 63 10.2. Y . 64 10.3. (M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

PFxx-OMS0001CN

( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

PF-OMM0004_C

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

LECA6_C

. /. 53 14 /. 54 141. . 54 142. 55 143. . 56 144. . 57 145. . 58 146. . 58 15. . 59 15.1. /. 59 15.2 . 59 15.3. 61 15.4 . 61 15.5 . 62 15.6 . 62 15.7 . 62 16. . 63 16.1 . 63 16.2 . 65 3 - LECA6 Series/ 1.

LECP6_C

. /.53 14 /.54 14.1 .54 14.2 .55 14.3 .56 14.4 .57 14.5 .58 14.6 .58 15. .59 15.1. /.59 15.2 .59 15.3 .61 15.4 .61 15.5 .62 15.6 .62 15.7 .62 16. .63 16.1 .63 16.2 .65 3 - LECP6 Series/ 1.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

53 77 154 154 7 10 47.3 11 10 44.5 143.5 82 54 4 55 75 23 27 7 5 66 36 10 15 30 The dimensions other than indicated below are the same as those of indicated on p.3.4-8.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black D0.5 9 10 10 Lead wire length (m) 3 50 53 53 205 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw Mounting screw M2.5 x 4l Slotted set screw OUT Black Indicator