Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 1/2, Accessory: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: Check Valve, Option 1: Metal Bowl, Option 2: -, Option 3: -

Size: 1/2, Thread: NPT, Port Size: 3/8, Accessory: None, Attachment: Check Valve, Option 1: Metal Bowl, Option 2: Flow Direction: Right->Left, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 1/2, Accessory: Float Style Auto Drain NC, Attachment: Check Valve, Option 1: Metal Bowl, Option 2: N+R, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 3/8, Accessory: Pressure Gauge, Attachment: Check Valve, Option 1: Metal Bowl, Option 2: Flow Direction: Right->Left, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 1/2, Accessory: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: Check Valve, Option 1: Lubricator w/Drain Cock, Option 2: None, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 1/2, Accessory: D+E, Attachment: Check Valve, Option 1: Metal Bowl w/Level Gauge, Option 2: None, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 1/2, Accessory: D+E, Attachment: Check Valve, Option 1: Metal Bowl w/Level Gauge, Option 2: Flow Direction: Right->Left, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 1/2, Accessory: Pressure Gauge, Attachment: Check Valve, Option 1: Metal Bowl, Option 2: None, Option 3: Name Plate, Caution on Bowl

Size: 1/2, Thread: NPT, Port Size: 1/2, Accessory: C+G, Attachment: Check Valve, Option 1: Lubricator w/Drain Cock + Metal Bowl w/Level Gauge, Option 2: None, Option 3: Name Plate, Caution on Bowl

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Extend the dimensions of A, H. when using a single/double knuckle joint together with a rod end nut. (To extend dimensions A/H, refer to the table below, and specify the product as Made-to-order -XAO.) Pin and cotter pin are attached for double knuckle joint.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Free Mount Cylinder

C J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth

Air Cylinder NCA1 Series

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

NCA1

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact SMC Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

Secondary Batteries

Model Option 90-AR25K 90-AR30(K) 90-AR40(K) 90-AR50K 90-AR60K Bracket assembly Note 1) 90-AR25P-270AS AR25P-260S 90-AR30P-270AS AR30P-260S 90-AR40P-270AS AR40P-260S 90-AR50P-270AS Note 2) Set nut Note 3) Note 3) Note 1) Assembly of a bracket and set nuts. Note 2) Assembly of a bracket and 2 mounting screws.

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

LEC-OM02704CN

ON DOCOM(7.6) OK ON OK 7 17 7MR Configurator a d e b f c g i j h i k m (1) (a) Enter (2) (b) Enter (3) (c) Enter (4) (de) (5) (f) (6) (g) (7) (h) (8) LSPLSN()ON (i) LSPLSNONLSPLSN (9) Z ON (j) Z 7 18 7MR Configurator (10)(k) (11)(l) (12)(m) (13)CC-Link CC-Link 7.7.3 7 19 7MR Configurator a b (1) (a) (2) (b) OFFONCC-Link 7.7.4 (DO) ON/OFF DO 7 20 7MR Configurator OKDO ON OKDO