DOC1023125

I/O cable JX-CI-E--S Cable length (L[m]) 1 1.5 *The terminal on PLC 3 3 5 5 10 10 Straight connector type /JX-CIS-E-*-S Connector type L (45.8) 2 3 S Straight 1 4 A Angle (15) 8(Core) 5 7 6 (5.8) (35) M12 8-pin socket A code Normal key (29.1) Angled connector type /JX-CIA-E-*-S *Angled connector type cannot be used for motor mounting position:parallel type. (15) Electric actuator (parallel

RSQ

MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required

A_HEC-OM-I009

Circulating fluid circuit -4-3 Fig. 5-1 HEC002-A -5-1 Fig. 5-2 HEC006-A -5-1 Fig. 5-3 Air Filter -5-2 Fig. 5-4 Top view -5-2 Fig. 5-5 Operation panel-5-3 Fig. 5-6 Display -5-3 Fig. 5-7 Reservoir Cap -5-4 Fig. 6-1 Cooling capacity -6-2 Fig. 6-2 Heating capacity -6-2 Fig. 6-3 Pump capacity -6-3 Fig. 9-1 Alarm indication in the event ERR14 arises -9-1 Fig. 9-2 Alarm indication in the event ERR14

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

CC

Model CCVS CCVL Bore size (mm) Intermediate stop accuracy of CCVS: 50 mm/s x 0.015 sec. = 0.75 mm in case of 50 mm/s Graph 5 10-17-4 5 Air-hydro Unit Precautions Be sure to read before handling.

Vacuum Pad: Ball Joint Type

50 +40 +25 +52 722 Lateral Vacuum Entry: With Buffer ZPR Series ZPR FJ K10-0-A14 (With buffer) 40 50 S Width across flats 10 Width across flats 10 S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A

MXQ

Stroke (mm)) With end lock With buffer 10 20 30 40 50 75 100 125 150 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 25 5 5 6 10 100 120 140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45

Digital Flow Switch (Integrated display type) ( compatible)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) PB PA A B (mm) Dimensions U S T U Model LVD2-S LVD3-S LVD4-S LVD5-S 11.5 28 9.6 26 34 17.5 26 35 20 29.5 57 25 17-5-49 8 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option combinations.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

S ... ...

VQ5000

SOL.B VQZ100-47-B Note) It can be used with all voltages. 2-6-3 4 Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0

DOC1023126

I/O cable JX-CI-E--S Cable length (L[m]) 1 1.5 *The terminal on PLC 3 3 5 5 10 10 Straight connector type /JX-CIS-E-*-S Connector type L (45.8) 2 3 S Straight 1 4 A Angle (15) 8Core 5 7 (35) 6 (5.8) M12 8-pin socket A code Normal key (29.1) Angled connector type /JX-CIA-E-*-S *Angled connector type cannot be used for motor mounting position:parallel type. (15) Electric actuator (parallel

Model Selection 1

/N.O./ Double acting Air operated valve 17-5-63 LVQ2/3/4/5/6-S Single unit Direct operated, Space saving type N.C./N.O./ Double acting Single unit LVQ2/3/4/5/6SS 17-5-73 2 port N.C./N.O./ Double acting LVA1/2/3/4/5 Single unit Direct operated Threaded type 17-5-17 N.C./N.O./ Double acting LLA2/3/4/5A Manifold LVH2/3/40 N.C.

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Cylinder with Lock Series CNG

100 0.5 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP

ISA2

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil

Digital Flow Switch (Integrated display type) ( compatible)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

ISO Standard Hydraulic Cylinder

5 !6 @9 @8 !4 !3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Sine Cylinder Series REC

0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8