CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Example: M5 x 50l 4pcs.

ZSE30/ISE30

stored: 35 to 85% RH (with no condensation) 1000VAC for 1 min. between live parts and enclosure 50M or more between live parts and enclosure (at 500VDC) 10 to 150Hz, 1.5mm amplitude in X, Y, Z directions for 2 hours each 100m/s2 in X, Y, Z directions 3 times each 01 type: R 1/8, M5 x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

NVKF

(Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81

ARJ1020F

Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

3 Way Direct Acting NVKF 300 Series

(Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81

ZSE1/ISE1

Variable hysteresis 1 to 10% of set pressure (Variable) Easy and simple wiring 16-6-1 2 Series ZSE1/ISE1 How to Order Operating pressure range/ Setting pressure range Piping specifications R 1/8 NPTF 1/8 01 T1 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) threaded.

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

MGC

M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25 Rc 1/8 20 40.5 70 73 162 25 58 241 14 104 26 55 M8 x 1.25 Rc 1/4 Bracket Mounting Stroke Long Stroke Without Rear Plate Bracket mounting stroke Stroke range (mm) Bore size (mm) Bore size (mm) Bore size (mm) Y R Z 20 25 32 40 50

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

MGC

25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting

PFxx-OMK0003CN

*2) 1. 2. 3. 1. 2. 3. 4

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Smooth Vent Valve

Please check the material used, and only fluids that will not interfere with the material. 1. Before mounting, clean the sealing surface with ethanol, etc. 2. Fasten the VCR and Swagelok properly, in accordance with the specified torque and methods prescribed by Swagelok. Reference) For VCR: 1/8 turn after tightening by hand For Swagelok: 1 1/4 turns after tightening by hand 3.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

rep-modular-e

shell holder O-ring 1 1 JIS B2401 P10 Valve guide O-ring 1 1 Chromate treatment Name plate O-ring 1 1 Complete product No. indicated JIS B2401 P20 Static pressure tube O-ring 1 1 JIS B2401 P30 Set nut O-ring 1 1 JIS B2401 G50 Bonnet Steel ball 1 1 Chromate treatment 4 Valve seat Retaining ring 1 1 TE-23 Cross recessed round head screw Diaphragm holder M5 x 0.8 x 8 Black Zinc chromate treatment

Modular Pressure Control Equipment F.R.L. Replacement Procedure

shell holder O-ring 1 1 JIS B2401 P10 Valve guide O-ring 1 1 Chromate treatment Name plate O-ring 1 1 Complete product No. indicated JIS B2401 P20 Static pressure tube O-ring 1 1 JIS B2401 P30 Set nut O-ring 1 1 JIS B2401 G50 Bonnet Steel ball 1 1 Chromate treatment 4 Valve seat Retaining ring 1 1 TE-23 Cross recessed round head screw Diaphragm holder M5 x 0.8 x 8 Black Zinc chromate treatment