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E Key lock function This function prevents incorrect operations such as accidentally changing the set value.

Assuming that the tube I.D. is 2 mm, the piping capacity is as follows: V = P/4 x D2 x L x 1/1000 = P/4 x 22 x 1 x 1/1000 = 0.0031 L (2) Assuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on the front matter 8.

1 Air Tank Series AT Model/Standard Specifications AT11C AT22C AT37C AT55C AT75C AT125C AT150C (1) AT220C (1) AT6C Model Fluid Tank capacity (l) 400 500 700 Compressed air 1000 1500 2000 3000 100 200 Max. operating pressure (MPa) Port size 0.97 Rc 1/2 Rc 3/4 Rc 11/2 2B flange 3B flange 4B flange Set pressure for safety valve (MPa) 0.97 1.46 0 to 100 Proof pressure (Under water pressure) (

resistanceIntermediate stopping point positioning methodPositioning setting spotDisplayInput signalOutput signalLowMediumStandardNominal size: 16Nominal size: 253-point stoppable type5-point stoppable typeE-MY2B10 to 1000 mm/s50 to 1000 mm/s100 to 1000 mm/sHeavy load0.25 to 2.45 m/s26 (10) kg11 (20) kgTrapezoidal driveHorizontal directionBoth ends (Mechanical stoppers), 1 intermediate positionBoth

resistanceIntermediate stopping point positioning methodPositioning setting spotDisplayInput signalOutput signalLowMediumStandardNominal size: 16Nominal size: 253-point stoppable type5-point stoppable typeE-MY2B10 to 1000 mm/s50 to 1000 mm/s100 to 1000 mm/sHeavy load0.25 to 2.45 m/s26 (10) kg11 (20) kgTrapezoidal driveHorizontal directionBoth ends (Mechanical stoppers), 1 intermediate positionBoth

resistanceIntermediate stopping point positioning methodPositioning setting spotDisplayInput signalOutput signalLowMediumStandardNominal size: 16Nominal size: 253-point stoppable type5-point stoppable typeE-MY2B10 to 1000 mm/s50 to 1000 mm/s100 to 1000 mm/sHeavy load0.25 to 2.45 m/s26 (10) kg11 (20) kgTrapezoidal driveHorizontal directionBoth ends (Mechanical stoppers), 1 intermediate positionBoth

Screw lead LC1-1(Either T-nuts or T-brackets for mounting) LC1-1-1000 (Controller connector) LC1-1-2000 (Controller connector) (Refer to page 85.) F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller.

ONOFF (31 ) ON OFF 31 61 61 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMS0006CN-G NPN () () ON ON 0 31 ON-OFF ON ( )(P1L~P1H) ON (31 ) () "digit" () 0 () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMS0006CN-G ON ( )(n1L~n1H) ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 () () F () ripple -13No.PS-OMS0006CN-G (3X8L(2 ) 0.50.05 Nm ,, A

resistanceIntermediate stopping point positioning methodPositioning setting spotDisplayInput signalOutput signalLowMediumStandardNominal size: 16Nominal size: 253-point stoppable type5-point stoppable typeE-MY2B10 to 1000 mm/s50 to 1000 mm/s100 to 1000 mm/sHeavy load0.25 to 2.45 m/s26 (10) kg11 (20) kgTrapezoidal driveHorizontal directionBoth ends (Mechanical stoppers), 1 intermediate positionBoth

When the bearing slides, e the spring for returning to center also expands and contracts. When the force in the lateral direction is released, r the center shaft is returned to the neutral position by e the spring for returning to center. Lock Mechanism Unlocked condition Unlocked condition Locked condition Locked condition The table becomes free when unlocked.

Flow Rate Characteristics FH99 e Element replacement When the pressure difference reaches 24 kPa during filter operation (actuating the differential pressure indicator), stop operation and either wash or replace the element. If any scratches or damage are found on the O-ring during assembly/disassembly, replace with a new O-ring.

Since Rotary Actuator reaches the rotation end during acceleration, terminal acceleration "" can be found by = 2 / t :Rotation angle (rad) t:Rotation time (s) Since Kinetic energy E is E = 1 / 2I2 Rotation time "t" of Rotary Actuator is I 2 2 t E EAllowable kinetic energy (J) IMoment of inertia (kgm2) Rotating angle (rad) 180o = 3.14 rad In uniformly angular accelerated motion, angular

F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775] [600] 3.3 11.4 24.5 5.3 15.9 27.5 3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13] (

x 10 -5 Pam3/s ZSE60F / ISE60 1 x 10 -10 Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of workpieces containing water To confirm primary pressure of cleaning line 16-2-26 3 High precision and high resolution 1/2000 (0.1 kPa) Positive pressure 1/1000

Replacement Parts Plug connector assembly (for plug lead) Sub-plate Lead wire length S07014A Port size S070S M3 M3 M5 M3 female thread M5 female thread 150 mm 300 mm 600 mm 1000 mm Nil 3 6 10 Gasket Mounting screw Valve model S070A S070B S070M Gasket No. S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw No.

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.