High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

100

consumption 300 300 Air consumption 200 200 100 100 0 0 Supply pressure [MPa] Supply pressure [MPa] ZL6H (With valve) ZL6M (With valve) 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 800 800 Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum

NCA1

1 1/4 1-14 7 1/2 1 3 1/2 2 1/8 2 2 1/8 NCA1-CB1401 9.3 6 19/32 3.032 2 1/2 1 1/2 1 1/8-12 8 1/2 1 4 2 5/8 2 1/2 2 1/2 NCA1-CB1402 10.6 7 1/2 3.032 3 1 1/2 1 1/4-12 9 1/2 1 4 1/4 2 7/8 2 3/4 2 3/4 Note) Pivot Pin not included Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air Filter No.2 No.2 Mist Separator Series AM Cases that require air removed with moisture, dust or oil, though air is not dried Industrial machinery (metal seals of drivers) 1 mg/m3 (ANR) Series AM Auto Drain AD402 Humidity 100% 0.3 m Oil odor Mist

Series HAW Water Cooled Aftercooler 1

Outlet air temperature = 37 1.3 = 28.5C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution 1. Design the piping for coolant water and compressed air with a bore that is greater than the bore of the piping connections. 2.

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Bore Size: 63mm, Port Thread Type: Rc, Stroke: 175mm, Body Option: M (Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 20mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 200mm, Option: B (2 Shock Absorbers), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 12mm, Stroke: 200mm, Adjuster: B [Shock Absorber (MXY12 Only)], Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 12mm, Stroke: 250mm, Adjuster: B [Shock Absorber (MXY12 Only)], Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: B (Basic Style), Bore Size: 32mm, Thread: TN (NPT), Stroke: 400mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: B (Basic Style), Bore Size: 40mm, Thread: Rc, Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: B (Basic Style), Bore Size: 32mm, Thread: Rc, Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: B (Basic Style), Bore Size: 32mm, Thread: Rc, Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: B (Basic Style), Bore Size: 32mm, Thread: Rc, Stroke: 400mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: B (Basic Style), Bore Size: 25mm, Thread: Rc, Stroke: 150mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 16mm, Symmetric Type: L (Symmetric), Stroke: 50mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 100mm, Adjuster: BS (Adjuster at Forwarding End/Shock Absorber), Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Bore Size: 12mm, Symmetric Type: L (Symmetric), Stroke: 50mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.