Bore Size: 40mm, Port Thread: M Thread (ø16) Rc Threads (ø25, ø40), Stroke: 800mm, Stroke Adjustment Unit: Left, Right Side w/o Adjustment Unit, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Centralized Piping, Bore Size: 25mm, Port Thread: NPT, Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Centralized Piping, Bore Size: 40mm, Port Thread: NPT, Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Standard, Bore Size: 20mm, Port Thread: G, Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Standard, Bore Size: 50mm, Port Thread: G, Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Standard, Bore Size: 25mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Standard, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 25mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Centralized Piping, Stroke: 800mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Made to Order: -

Bore Size: 40mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Centralized Piping, Stroke: 800mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Made to Order: -

Mounting: Rear Flange, Bore Size: 32mm, Port Type: NPT, Stroke: 800mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Magnet: Built-in, Mounting: Basic, w/o Bracket, Bore Size: 80mm, Stroke: 800mm, Rod Boot: Single Rod, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Mounting: B (Basic Style), Bore Size: 63mm, Thread: TN (NPT), Stroke: 800mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 32mm, Port Thread: TN (NPT), Stroke: 800mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

45.5 55.5 55.5 37.5 34.5 24.5 24.5 24.5 30.5 3 20.5 13-/22-MXQ20(L) 81.5 75.5 78.5 43.5 47.5 37.5 27.5 37.5 35.5 3 37.5 27.5 17.5 27.5 25.5 33.5 65.5 68.5 73.5 23 13-/22-MXQ25(L) 92.5 64.5 92.5 50.5 56.5 46.5 36.5 36.5 50.5 3 46.5 36.5 26.5 26.5 40.5 40.5 54.5 82.5 73.5 27 800 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Basic 2 x M2.5 x 0.45 thread depth 3 2 6 Operating port 2 x M5 x 0.8

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

EX250-SCA1A_eng

Before Use Fieldbus device EX250-SCA1A : Output numbers are assigned to stations from side D to U of manifold in order. (Refer to manual of each valve manifold for the directions of side D and U). : Standard manifold is wired in double. Output numbers are assigned to side A and B alternatively. In case of single solenoid valve, output on side B is free.

AMP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)