Drain Separator for Vacuum Series AMJ 1

Description AMJ3000 AMJ4000 AMJ5000 AMJ-EL3000 AMJ-EL4000 AMJ-EL5000 Element assembly w AMJ-CA3000AMJ-CA4000AMJ-CA5000Bowl assembly Note) e 111512 111636 111636 NBR O-ring r 111710 NBR O-ring t Note) Refer to the above for How to Order Bowl Assembly. 13-13-4 5 Drain Separator for Vacuum Series AMJ Dimensions AMJ3000/4000 L F A Bracket (Option) G K M D J C E H H OUT IN ZX ZR 2port size

Low torque Metal seal type Rotary joint

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

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IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 300 (3"), Stroke: 300 (3"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Air cooled Thermo-con (Compact type)

Response message from the product: Send the measured temperature (00250 =25.0 deg C) at that moment.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

MXU

Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch model No. of auto switches mounted D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV 1 pc. 5 5 5 2 pcs. 10 10 5 Auto switch model Bore size (mm) Operating Range 6 5 10 6 16 9 D-A9/A9V 3 (2) 3.5 (2) 5.5 (3) D-M9/M9V D-F9W/F9WV Since this is a guideline including hysteresis, not meant to be guaranteed.

MXU

D-A9V D-M9V D-F9WV ( ): Denotes the values of D-M9V, D-F9WV.

Miniature Guide Rod Cylinder Series MGJ

Auto switch internal circuit Weight Unit: (g) D-F8N D-F8N D-F8P D-F8B Auto switch part No.

Slide Tables MX Series

D 1.Body tapped H H l Guide block D l Max.tightening torque ftlb (Nm) Locating pin hole D x H (mm) Max.screw-in depth l (mm) Bolt used Model Use a bolt that is less 0.5mm than max.(l)screw-in depth to avoid contacting the guide with mounting bolt.

Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

E-P HYREG ® Series VY1 1

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) F.R.L.

Digital Gap Checker

[June 2018] C: Contents revised in several places. [September 2019] D: Contents revised in several places. [October 2021] E: Contents revised in several places.

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 300 (3"), Stroke: 300 (3")