Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

E (J) of the load.

EX600-DX_DY_DM_eng

The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED

PAB-OM-B006-B

C ircuit(1 ) C ircuit(2 ) Pilot valve set K T PA 5 3 8 NBR diaphragm set K T PA 3 3 2 PT F E diaphragm set K T PA 3 3 1 S w itching valve assembly set K T PA 3 3 6 A ctuator parts set K T PA 3 3 7 4 . Maintenance 3 . How to use Warning E nvironment When using hazardous fluid, take measures to keep people aw ay from the pump.

High performance type Step Motor Controller (Servo/24 VDC)

ALM E Power I sens off An overflow of the position error counter inside of the controller is occurred. Position deviation counter overflow (01-196) overflow E Power Make sure there are no obstructions that interfere with the electric actuator movement.

SFOD-OMT0005CN

<> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

LECA6_C

ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.

Step Motor Driver （ Pulse input type ）

Err overflow (1-196) E Power off Check if the travel of the electric actuator is interrupted. Check if the load of the electric actuator is within the specification range. An error of the EEPROM is occurred.

Filter Regulator

D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

HEC-OM-R008

Take measures to minimize the static electricity from circulating fluid. to L, N, E inside of the connector, then reassemble the power supply connector. 11.0 to 70.0C 7 High Temp.

Series MLGP

t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.

Compact Guide Cylinder

, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5 5.5 4 10 50 8.5 12.5 7.5 4 12.5 E The

CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

AMF

AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMG No. Description AMF801/901 SGP-E: SS400 Filter case Cover q w AFF SS400 Replacement Parts AMl Part No. AMF800 AMF801 AMF900 AMF901 AMF1000 No. Description Material Related poroducts NBR 63271 63271 63271 3pcs. 63271 3pcs. 63271 5pcs. Element Packing e r 63148 63148 63148 3pcs. 63148 3pcs. 63148 5pcs. O.D.112 X I.D.90 X T3 5 pcs.

MHL2

7 Stainless steel Stainless steel Piston rod Washer Nitriding e !8 Sainless steel Rack r Oil containing polyacetal with back metal Bearing !

PSE200

Wire core size AWG24-26 (0.14 to 0.2mm) AWG24-26 (0.14 to 0.2mm) AWG20-22 (0.3 to 0.5mm) AWG20-22 (0.3 to 0.5mm) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 1.4 to 2.0 PSE521 1.0 to 1.4 PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. Brown Black Blue N.C. 1 2 3 4 F.G.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

VXP21/22/23

High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

ZQ

SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

,,: ,.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

NVZseies

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .