Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .54634 lb, Model ?3Vane typeRotating angle ?

Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .50424 lb, Model ?3Vane typeRotating angle ?

PSxx-OMG0001CN

+420 mA 5 PNP2 + A B D + 1 2 M SI 1 1 2 L kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90

LV50-OMQ0002

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

HRX-OM-M090

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS012-AApprox. 2 40 20 HRS018-AApprox. 4 70 40 HRS024-A-20 Approx. 5 90 50 The water-refrigerated thermo-cooler discharges heat

HRX-OM-W060

100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

HRX-OM-X037

Fig. 9-22 Cooling Capacity (HRL100/200-W-40-T2 CH2) HRL Series 9.4 Cooling Capacity 9-19 HRX-OM-X037 Chapter 9 Documents 9.5 Pump Capacity 9.5.1 HRL100-A/W-40 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig.

HRX-OM-W002

The factory default pump output setting is 90%. 4.2 Starting and Stopping HRR Series 4-2 HRX-OM-W002 Chapter 4 Starting the Product ECO F RUN Lighting up MPa ALM RUN PSI MPa ALM WRN LPM GPM WRN LPM RUN M RMT RMT H H SEC EXT SEC AT MENU RUN/ STOP MENU RUN/ STOP ENT RESET Press and hold for approximately 1second.

High Vacuum L Type Valve

Heater specifications Item XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

Rotary Table

Specifications Size 1 2 3 7 Fluid Air (Non-lube) Maximum operating pressure 0.7MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C (with no freezing) Cushion No cushion Lubber cushion Allowable kinetic energy 0.001J 0.0015J 0.002J 0.006J Angle adjustment range 0 to 190 Maximum rotation 190 Rotation time adjustment range 0.2 to 0.7 s/90 0.2 to 0.1 s/90 Cylinder bore

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh

SFOD-OMT0005CN

(LE ) ,, () EMG() 1000 1 -69- /(Best Pneumatics No(2)) 17.2 () () -70- 17.3. 90 100 (DC24V)SVON () a) b) c) d) e) D (100) -71- 17.4. 1. 2. () 3. () 4. 5. 6. 7. 8. () 9. 1000m (-10603585%) -72- 17.5 5 17.6.

LECA6_C

LE ,, () EMG 1000 1 54 - /Best Pneumatics No UL ,UL1310 Class2 142 55 - 143. 90~100 DC24VSVON a) b) c) d) e) D 100 56 - 144. 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 57 - 145. 5 146. SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4.

JXCx-OMT0032CN

RH() -10 60() 90%RH() 2(0.5G) 4.9m/s IP20 200g() 220g(DIN) 11 - 3.2 1 LED 2 Node ADDRES MSD,LSD 3 B RATE IF 4 CN2 SW IFCN2 5 CN4 EMG TM 6 CN3 DeviceNet 7 CN2 TB/PC LEC(LEC-T1)(LEC-W2) 8 CN1 CONT IF(LEC) 12 - 3.3 (1)(LECGDN1) () (DIN) 187.3(DIN) 193.2(DIN) *DIN(35mm) () (2)DIN(LECGDN1D) 187.3(DIN) 193.2(DIN) *DIN(35mm) 13 - 3.4 (1) DIN2 (LECGDN1) DIN(LECGDN1D) (DIN) (2M4)

air-filter-e

O-ring (New) O-ring (Used) Gasket (New) Gasket (Used) Element (Used) Element (New) Case AMD80, 81, 90, 91, 100 y Replacement Parts e Element r Seal t Seal y Gasket u O-ring (Material: NBR) (Material: NBR) (Material: V#6500) (Material: NBR) IN OUT Model applicable filter Kit no. Kit no. Kit no. Kit no. Kit no. Qty. Qty. Qty. Qty. Qty.

1.63

mm Find the point of intersection for the load mass of 3 kg and the eccentric distance of 90 mm on graph (6), based on vertical mounting, ball bushing, 50 stroke, and the speed of 200 mm/s.