ML1

No load 50 1000 500 The length of overrun Piston speed just before stop (mm/s) The graph above shows the relation between piston speed and overrun. (The length of overrun is changed, dependent on piston speed, load, piping conditions and control method.

VND

(Valve open) Pilot port Indicator (Option) (Back side P2) Bracket (Option) Main port Main port Rc A B C D E F G M N P Q R S T U Model 3 8 1 2 3 4 1 VND20D-10A VND20D-15A VND30D-20A VND40D-25A 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 80 90 50 60 35 40 17.5 20 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 17-4-40 5 Series VND Steam Valve: 2 Port Valve

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10

PF-OMN0011_C

) 3585R.H.() AC1000V1 50M (DC500V ) CE UL(CSA)RoHS 50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S. 7 s 2 5F.S. 1090 2 (ZS-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

Suction cups with flange

Specifications Product specifications Standards Conforming to ISO 9409-1-50-4-M6 Applicable fluid Air Operating temperature range [C] 5 to 50 Weight [g] (Except cups with adapter) 228 Max. work load [kg] Note2) 7 Air pressure supply (P) port M5x0.8, Rc1/8 Applicable suction cups Refer to 3.3. How to order Note 1) The weight changes by the selected suction cup. Refer to 3.3 How to order.

IDX-OM-W029

/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20 AC200V (3) A (50/60Hz) 10 15 R407C (HFC) AC230V (50Hz) 45010 76010 55010 74510 g AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22 37 55 75 1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

High Pressure Coolant Valve

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 20.5 27.5 38 50 50 60 4.5 7.5 4.5 7 9 9 Note 1) Negative figures in the table D indicate how much the load wires protrude from the cylinder body.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

ARP3000-02 VY1 G ARP3000-02BG PPA How to Order JIS Symbol AL ARP 3000 BG R 02 Option Direct operated precision regulator Nil None Reverse flow R Thread type Accessory Nil N F Rc NPT G Nil None With bracket With pressure gauge B G Pressure gauges are shipped together with regulator, (but not assembled).

Angle Seat Valve /

In the case of liquids: DP Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av DP(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 11

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Load 50% Driving pressure: 0.5 MPa Brake releasing pressure: 0.25 MPa Mounting position: Horizontal Amount of overrun (mm) 100 No load 50 500 1000 Amount of overrun Piston speed just before stop (mm/s) The graph above shows the relation between piston speed and overrun. (The length of overrun is changed, dependent on piston speed, load, piping conditions and control method.

10-cna2-e

Seal kit includes a grease pack (40 and 50: 10 g, 63 and 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Load 50% Driving pressure: 0.5 MPa Brake releasing pressure: 0.25 MPa Mounting position: Horizontal Amount of overrun (mm) 100 No load 50 500 1000 Amount of overrun Piston speed just before stop (mm/s) The graph above shows the relation between piston speed and overrun. (The length of overrun is changed, dependent on piston speed, load, piping conditions and control method.

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184