: °C, Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)
: °C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)
, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)
Series PF2D Digital Flow Switch For Deionized Water and Chemicals Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).
For all other options, allow extra dlivery timE. 4grrc 1P3100 SPECIFICATIONS Unit acts as a 3-way or 4-way proportional position control valve (single or double acting) Supply Pressure 20 100 psi (1 .4 7.0 kg cm'z) Signal Pressure 3 15 psi (0.2 1 .0 kgficm') Sensitivity Less Than 0.3olo Linearity Within +2% FS. Hysteresis Less Than 1% FS. Repeatability Within :t0.5% FS.
T 100 2 () 100 IDF Series 4-1 4 1 IDX-OM-W011 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDF Series 4-2 4 2 IDX-OM-W011 4 30 (2) 30 () O IDF Series 4-2 4 3 IDX-OM-W011 4 1 IDF1E AD37-A AD38-A 1 IDF2E/3E/4E AD48-A 1 IDF6E/8E/11E/15E1 ) 20193 20192SERIAL No.XPAD37 AD38 AD48 SMC WEB IDF-S0001 1 IDF1E/2E/3E/4E IDF-S0002 1 IDF6E/8E/11E/15E1 C32FP-260S 1 IDF1E/2E/3E/4E C42FP-260S 1
. / 3.3 OFF 3.4 3 3 5 3.5 OFF 3.6 24 3 2 4. 4 4.1 5 310 4.2 4.2.1 () 4.2.2 1 () (T) 100 2 () 100 4.2.3 IDF-S0002 1 4 1 4. 4.2.4 AD48 1 0 OFF 501015 ( OFF IN/OUT 4 2 4.
T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W014 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W014 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W014 4 AD48-A 1 IDU3E/4E/6E ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 IDU3E/4E/6E C42FP-260S 1 IDU3E/4E/6E IDF-S1933 1 IDU3E/4E/6E 2 IDU Series 4-2 4 4 IDX-OM-W014 5 5 5-1 3 ON OFF () 3 2 R T 600mm
T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2
T 4-2-3 100 2 () 100 4 1 4 0 OFF 501015 OFF OFF IN/OUT ( ) 4 2 4 ) 30 () 30 O 4 3 4 AD48-A 1 ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S1933 1 2 4 4 5 5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 5 1 5 () 60cm 1 2 INOUT INOUT () 5 2 6 6 6 1 IDFA6E-2050Hz 0.75 m 3/h (ANR) 1 60Hz 0.82 0.7MPa 35 32 10 oC 550 0.15MPa 1.0MPa
Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC
Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: without Option, 1st
Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: K (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: without Option, 1st
Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 4 (ø1.5), 1st
Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation
Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: T (Pressure Sensor, -100 to 100, Analog Output 1 to 5 V), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type), 1st Nominal Nozzle Size: 2 (ø1.0), 1st Selection Supply
Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: T (Pressure Sensor, -100 to 100, Analog Output 1 to 5 V), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type), 1st Nominal Nozzle Size: 2 (ø1.0), 1st Selection Supply
Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: K (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow
Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation