Table of Contents

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 14-2-37 38 Series AF10 to 60 Dimensions L AF10/20 AF50/60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30/40/40-06 L Courtesy of Steven Engineering, Inc.-230 Ryan

Air Cylinder

Pivot Bracket Pivot Bracket Pin (For CM2C) Pivot brackets consists of a set of two brackets. 7.5 40 7.5 40 3.4 3.4 6.8 6.8 R3.4 R3.4 6.8 6.8 25 25 R3.4 R3.4 Dd9 d 0.2 17 0.2 17 R11 R11 m m L2 +0.15 +0.05 +0.15 +0.05 CD CD t L1 t 5.2 40 5.2 40 3.2 3.2 57 28 57 28 (mm) (mm) Applicable bore size Part no.

MY1

acceleration (9.8 m/s2) MY1HT63 MY1HT63 m: Load weight (kg) F: Load (N) FE: Load equivalent to impact (at impact with stopper) (N) a: Average speed (mm/s) M: Static moment (Nm) = 1.4a (mm/s) FE = 1.4amg Load weight (kg) Load weight (kg) Load weight (kg) MY1HT63 100 100 100 Note 4) MY1HT50 MY1HT50 Note 5) 1 3 50 50 50 ME = FEL1 = 4.57amL1 (Nm) MY1HT50 40 40 40 Note 4) 1.4a is a dimensionless

MG

Note 2) Model MGPL (Ball bushing bearing) cannot be used as a stopper. 1 20 30 40 50 5 10 Transfer speed: (m/min) Bore Size: 32 to 100/MGPM32 to 100 (Slide bearing) MGPM32 to 100 (Slide bearing) m m 2000 l 50 mm l 50 mm 100 1000 80 Weight of transferred object: m (kg) 63 500 400 50 300 40 200 When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) Stroke range (mm) 40 50 63 80 100 S A AL B B1 C D E F H1 MM K M KA J HX N RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6

Modular F.R.L. Unit

OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Modular Design with Uniform Body Style

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Automatic*1 Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A (Auto drain) *1 The bowl assembly comes with a bowl seal. m in bowl assembly part numbers indicates a pipe thread type (applicable tubing for auto drain).

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Rotary Actuator/Vane Type

B port (40) A port * For size 40 actuators, a parallel key will be used instead of chamfer.

15

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 865 LEYG Series Motorless Type * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 864 and 865. * The values shown below are allowable values of the actuator body.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Manual override (L4) L2 5 (Rail mounting hole pitch: 12.5) L1 SS5Y5-M45Stations B Pitch SY5000 Pitch SY3000 L dimension: Formulae for L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 15.5 26 26 15.3 17 P=16 P=12.5 16.9 Button for DIN rail release L3 12.5 M= ( + 1) Omit decimals 31.5 32 71.1 [78.1] 71.5 [78.5] 14.5 R R A A A A A A L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 B B B B B B P P A, B

V100

A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 50 40 30 20 10 0 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 50 40 30 20 10 0 Transfer load m (kg) Refer to page 71 for deflection data. 42 46 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FPH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

CRB2/CRBU2/CRB1

Load at the end of lever + m a + K 3 a1 I = m 12 4a + b (Example) When the shape of m is a I = m + m 12 4a1 + b 5 2r sphere, refer to 7 above: w K = m 10. Gear transmission 5. Thin rectangular plate (rectangular parallelopiped) Position of rotational axis: Through the center of gravity and perpendicular to the plate (also the same in case of a thicker Number of teeth = a plate) 1.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

1

32 272 178 36 Stroke B Stroke A S + Stroke (A + B) ZZ + Stroke (A + B) 40 280 178 38 50 314 198 41 63 314 198 43 80 386 242 52 ZZ S Q L GC Bore size (mm) 100 386 242 52 40 282 180 66 12 42 GC 50 310 194 74 14 48 Stroke B Stroke A Series MB1 63 326 210 76 14 48 S + Stroke (A + B) 80 390 248 90 16 58 ZZ + Stroke (A + B) 100 414 270 98 18 60 Stroke B Stroke A ZZ + Stroke (A + B) S + Stroke

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S