HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(mm2) Effective area (mm2) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07,08,09,10,11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 Effective area (mm2) Effective area (mm2) 20 12 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 12 10,11

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Ejector Valve Unit, Series ZYY/ZYX

MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics -100 -100 -100 -100 Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ SS 20 10 9 2 x 4.3 through Z 2 x 8 counterbore depth 4.4 18 5 30 1 M6 x 1.0 x 5 L (Hexagon socket set screw) 450.2 450.2 48 56 25 58 6.3 5 2 x M4 x 0.7 thread depth 6 1 M4 x 0.7 x 14.5 L and M4 x 0.7 (Hexagon bolt) (Hexagon nut) 9 M5 x 0.8 x 10 L (Hexagon socket head cap screw) 2 x M5 x 0.8 (Through-hole) (Z) 2 x M5 x 0.8 thread depth

Floating Joint

force (N) Center of sphere R Standard: Heavy Load Type Hydraulic: Up to 7 MPa M A Allowable eccentricity U Maximum thread depth P Weight (kg) B C D T J G H JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 9000 14000 22000 36000 55000 55000 16 20 24 30 39 48 50 62 72 82 100 100 50 59.5 66 79 96 96 15 18 21 24 29 29 75 100 100 125 150

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q KPL04-00 20.7 4.5 18 3.5 3.5 3 10.4 4 KPL06-00 22.8 5.3 19.5 9 9 7 12.8 6 D KPL08-00 26.3 6 21.5 22 15 11 15.2 8 4.2 KPL10-00 29.4 6.8 24 35 25 16 18.5 10 M 8 KPL12-00 L 31.4 7.5 25 50 40 20 20.9 12 Note 1) D indicates the maximum diameter.

Modular F.R.L. Unit

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Information

Bore size Stroke range head cap screw for CW CT CL CX CD M CZ R CN mounting pivot bracket (Accessory) Without auto switch With auto switch CQ-C032 32 5 to 50 50 60 60 20 5 30 18 10 34 45 80 6.6 M6 x 12 L 75, 100 5 to 50 58.5 68.5 66.5 76.5 CQ-C040 40 68.5 22 6 32 18 10 40 52 80 6.6 M6 x 14 L 75, 100 10 to 50 CQ-C050 50 76.5 28 7 42 22 14 50 64 80 9 M8 x 16 L 75, 100 CQ2 10 to 50 74 84 CQ-C063

Modular F.R.L. Unit

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

KJ

Branch Y: KQ2U Model H (Width across flats) D M L A Weight (g) Applicable tubing O.D.

MGZ Series

40 510 30 50 70 100 200 300 2 10 30 50 70 100 200 300 Eccentric distance L (mm) Eccentric distance L (mm) Continuous line: Operating pressure 0.4MPa or more Selection graph to 700mm/s Selection Example: Vertical Upward Mounting 100 50 Selection conditions Mounting: Vertical upward (lifter) Maximum speed: 500mm/s Load weight: 40kg Eccentric distance: 80mm Load weight m (kg) Refer to graph

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Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

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SERIES CP CYLINDER POSITIONING ASSEMBLY SPECIFICATIONS SPECIFICATIONS CHARACIER|tiNCS Supply Prsgsure 40-100 PSlc (3.0-7.0 KsTcmr) Signal Presure 3-15 PSlc (0.2-l Kq/cm,) Lineari|y Less than I 2% Hysteresis Less than 'l % Repeatability Less than l qio Sensllivity Less than 0.5% ot full soan Air ConsumDtion { in.) 0.64 Scfm (18 Numin) @ 70 PSIG (5.0 Ksf/cm?)