Combination Cylinder

Description Material Auto switch model 40 50 63 80 100 NBR NBR NBR NBR NBR NBR NBR NBR Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Tube gasket Cushion valve seal Piston gasket #6 #7 #8 #9 $0 $1 $2 $3 D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NTL, F5BAL, F59F D-A3/A44/G39/K39 D-B5/B6/B59W D-G5/K59/G5W/K59W D-G5BAL/G59F/G5NTL D-A3C/A44C/G39C/K39C BT-04 BT-04 BT-06 BT-08 BT-08 BD1

VCC

E VVCC12-2A-02F Hexagon socket head cap screw with M5 x 20 SW Stainless steel w Hard anodized containing PTFE D-side end plate Aluminum q D-side end plate assembly for 2 port valve Plug When neighboring valve is a 2 port valve.

Membrane Air Dryer

IDG Reduced purge IDG<A Series Dimensions IDG3M2, 5M2, 10M2, 20M2 IDG3HM2, 5HM2, 10HM2, 20HM2 P (A) L (B) P C D M Q Purge air for H dew point indicator J F K 37 N IN OUT (G) (E) (Maintenance space 100 mm or more) M5 female thread Drain P (A) IDG30AM2, 50AM2 IDG30HAM2, 50HAM2 IDG30LAM2, 50LAM2 (B) P D C Purge air for L Q H dew point indicator M J 37 F Drain Discharge N With float type auto-drain

AC Servo Motor Driver (Network card type ）

OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 F 2 D 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN

AC Servo Motor Driver (CC-Link Type ）

RY(n 2)E RY(n 2)D RY(n 2)C 0 0 0 1 0 0 1 2 0 1 0 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 Note. 0: OFF 1: ON RY(n 1)A RY(n 3)A Reset Keeping RY(n 1)A or RY(n 3)A ON for 50ms or longer allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A.

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

KC

M H D Union tee Elbow plug for frequent use It can save tube cutting labor in the case of frequent tube installation and removal. Use to connect a self-seal fitting and a tube at the right angles to a self-seal fitting. P. 61 KCL P. 69 KCT MS Use to connect tubes in both 90 directions.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

(when using the cylinder tube threads) E t E t Compatible Mounting Bolt Dimensions A type mounting B type mounting Model Mounting bolt size D: Bolt length (mm) E (mm) C (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB30-D MQQTB40-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB30-D MQQLB40-D 8 to 11 M4 x 0.7 M3 x 0.5 35 + Stroke 7 35 + Stroke 7 Standard type MQQT 40 +

LEC-OM02704CN

AC200230V AC100120V 40 6 AC100120V AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log

S070

where the valve is removed for maintenance or a replacement valve is going to be mounted. 21.5 Intermediate block assembly (for SS073A) Intermediate block assembly U side D side SS070A-B (for separable base) 7.2 Valve Valve 1 (P) 3 (R) This assembly is used to secure the manifold when a large number of stations are manifolded.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

VKF300

Proper tightening torque Nm {kgfcm} Tightening torque for piping Connection threads M5 Rc(PT) 1/8 1.5 to 2 {15 to 20} 7 to 9 {71 to 92} Reference: Tightening into the M5 fitting threads After tightening by hand, tighten about 1/6 of a turn further using a tightening tool.

CE

D-F9 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 Switch Hysteresis D-F9W 6 15 19 41 46 43.5 Proper auto switch mounting positions (Series CEP1 ) (mm) Bore size (mm) 12 Auto switch model Symbol 20 A B A B A B A B A B A B A B 75.2 82 Switch operating position (ON) D-A90, A93, A96 7.9 12 75.2 82 D-A90V, A93V, A96V 7.9 12 Hysteresis Reed switch: 2mm or less Solid state switch: 1mm or less 79.2 86

REC

cable O.D.: 6.8 to 11.5) CE1 CE2 Proper Auto Switch Mounting Position D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C ML2B D-G39 D-K39 D-A33/A34 D-A44 D-B5 D-B64 D-B59W D-G5NTL Bore size (mm) C J G5-S A B A B A B A B A B A B CV 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 25 MVGQ 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B C D E 19.5 20.5 8.5 9.5 1.8 3 6.5 8.5 7 8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 90 Miniature Fittings M3, R(PT) 1/8, M5 Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective orifice(mm2 Part No. A B C ) 2.1 4.0 12 14 5 8 1.8 2.5 M-5AN-4 M-5AN-6 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

E VVCC12-2A-02F Hexagon socket head cap screw with M5 x 20 SW Stainless steel w Hard anodized containing PTFE D-side end plate Aluminum q D-side end plate assembly for 2 port valve Plug When neighboring valve is a 2 port valve.

REC

Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0

Electric Actuators

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.