VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Electric Actuator Triple Axis P&P Unit

Matsushita Electric Industrial Co., LTD For side mount type, motor specifications L, M, N, and P are used.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N Diaphragm material For AIR EXH Air operated type is not available with silencer (symbol N). 1 PTFE (fluororesin) Symbol Type of operation 1 3 Connection port size 1/8 (6A) Built-in solenoid valve Air operated 01 FLUID OUT AIR SUP AIR EXH Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N Diaphragm material For AIR EXH Air operated type is not available with silencer (symbol N). 1 PTFE (fluororesin) Symbol Type of operation 1 3 Connection port size 1/8 (6A) Built-in solenoid valve Air operated 01 FLUID OUT AIR SUP AIR EXH Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Base mounted Common

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45

Clean Gas Filter

(Filtration 0.01 m (Filtering efficiency 99.99%)) Made into a cartridge by fluoropolymer holder and fluororubber (FKM) gasket. Description Aluminum case (Refer to page 312.) X8 Symbol Nil Model type Symbol Type 10 Cartridge Elements are replaceable. Port size Port size Rc, NPT, TSJ, UOJ Female thread 1/4 M5 02 M5 Symbol Connection Bracket is included as a standard.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic style: MGGB 20 to 50 4-F through, counterbore G Bottom 4-H M N HR HN (MAX.)

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

VKF300

(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300 Dimensions/Manifolds Base Mounted Type Common SUP, Common

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

VQ4000

Stations (Maximum 16 stations) Formula L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) L n Dimensions L n Dimensions 8 263 276 L1 L2 7 238 251 8 263 276 L1 L2 6 213 226 7 238 251 5 188 201 6 213 226 4 163 176 5 188 201 3 138 151 4 163 176 1 2 113 126 3 138 151 1 2 113 126 88 101 88 101 L n L n 9 288 301 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 9 288

EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield N.C.

IIIIIII

E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54

PSxx-OMU0002CN

-2No.PS-OMU0002CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0002CN-D () () () () -4No.PS-OMU0002CN-D () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMU0002CN-D * FG (35 N () () *() 6 33 () () DC(-)() () * -6No.PS-OMU0002CN-D ( ) () CE -550(5) * 1015 10 1% 2264 LCD * -7No.PS-OMU0002CN-D M5 ISE20A X M 3 ISE20A -0.100~1.000 Mpa Y ZSE20A 0.0~-101.0 kPa K ZSE20AF

Mechanical Valves Series NVM, NVFM, NVZNI

E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

ZPT/ZPX

load 11.8 N EPR 10 N First mounting load 100, 150 15 N Second mounting load 13-11-89 8 Series ZPT 40 50 63 80 ZPT HBJ-B01-A18 (Male thread) ZPT HBJ-B01-A18 (Male thread) Rc 1/8 Hexagon width across flats 14 Rc 1/8 Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 9 9 35 35 10 9 9 M18 x 1.5 M18 x 1.5 10 H H Width across flats 16 Width across flats 16

CG1

X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400 25 25 19.5 27 32 32 37 37 10 (12) 40 71 (79) 113 (121) 15 (16) 5.5 6 7 7 10 10 M5 X 0.8 Depth

Lubrication Equipment

1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.