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7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

Options: On Time (T, t); Off Time (T, t) Period: Time (T,t), Count (N,n), or Continuous Inputs: I> (Input) Outputs: ON/OFF and Word Comparison 6.8 The TimeSW Block The real time clock in the TimeSW block can be programmed for a date operation or for a weekly schedule.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

MGOM.,/Slide bearing MGQL,,/Ball bush bearing MGQL12-25-3O more stroke MGOM'12-2s-Lil . 5 O l O O , MGQM32-1OO t l01ooT P=o.5MPa 1 ,*"1 -Tt r t r . l 080 ; , . d63 t t , 5od ' l4oo o50 E;\ .' !

Note 2) When changing the port location, please order a new port plug: MXH-P (2 pcs.)

GA33-10-01 Outlet pressure (MPa) ARJ AR425 to 935 ARX Width across flats 10 AMR ARM ARM Note 1) in the gauge part no.

K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14 () 109 No.SFOD-OMT0009CN-B 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 [mm/s] 1100 1400 1500 [mm/s] 48 () [mm/s] 78 () 1.6 LER LER10 LER30 LER50

VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

SYJ500-P.19 SYJ700-P.21 D 0.1Nm [E ] (D,E) 9 No.SYJ300-OMU0003 SYJ Series 300mm Assy DCSY100-30-4AAC100VSY100-30-1AAC200VSY100-30-2AACSY100-30-3ADC SY100-30-A 2 300mm 6 600mm 10 1000mm 3.23.7mm 15 1500mm () 20 2000mm 25 2500mm 30 3000mm Assy {}2000mm 50 5000mm 0.2-0.33mm 2 1.7mm DC AC SYJ312-5LO-M3 SYJ312-1LO-M3 SY100-30-4A-20 SY100-30-1A-20 (+-) (1mm) 10 No.SYJ300-OMU0003

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. 3 SCREEN HI PRECISION DIG PRESS SWITCH. N63. 71.00000 lb. VACUUM SWITCH, ZSE30, ZSE30A.

Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29