VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

48

(OL) 4 x NN through U X PW PE VA 2 x P (Plug) H R T 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) Flow Characteristics Flow Characteristics ZM10H ZM13H Exhaust Characteristics Exhaust Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Series IDG

min (ANR) (SCFM) Note 2) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

End Lock Cylinder Series CBG1

+ l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202) 227 (239) 245 + l 303.5 + l 239 (253) + l 297.5 (311.5) + l 80 236 294.5 230 (244) 288.5 (302.5) 253 + l 329.5 + l 247 (261) + l 323.5 (337.5) + l 100 244 320.5 238

KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

Antistatic One-touch Fittings Series KA

M5, M6 D L A M Part No.

Sine Cylinder Series REC

The plug (M5 x 0.8) in the standard dimensions becomes a relief port. Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Sine Cylinder Series REC

The plug (M5 x 0.8) in the standard dimensions becomes a relief port. Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Electric Actuator Triple Axis P&P Unit

x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44)

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

CG1

73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

Escapements Series MIW/MIS

Therefore select MIW (MIS) 20. 3 Escapements Series MIW/MIS Operating range MIW12 MIS12 MIW20 MIS20 The graph at right shows conditions of the work piece to be stopped; that is, the weight, transfer speed and the operating range of the point of application L. 30 20 10 L=120mm L=100mm L=80mm L=60mm L=40mm 20 L=90mm L=70mm L=50mm L=30mm 10 Work piece weight kg Work piece weight kg 5 5 1 1

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

x 0.8 Relief port X GA RA 2 x Rc P H1 Width across flats KA 2 x LD GB MM R0.4 D I 0 E0.05 LH L Width across flats B1 ZZ + Stroke S + Stroke H A AL N Y L LX K F Female thread type X effective depth A1 MM ZZ + Stroke H (mm) LD I H1 H K F E A AL L B1 D Stroke range MM LH LX GA GB KA RA S Y 40 30 27 25 6 19 16 47 8 39 Up to 300 52.4 2 32 22 19.5 18 5.5 17 12 32 6 38 Up to 200 42.4 2 25 22 19.5