Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .
Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .
2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P 0.5 to 4 P P P 2 to 16 P P P 5 to 40 Features 1 Maximum Flow Rate 3000, 6000, 12000l/min types have been newly released!
Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-
Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM
, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type
How to order MHM-25D-X7400A-ASSISTA(-P) 6 - 3-2.
Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.
Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM
p. 29 Construction p. 13 Dimensions p. 15 5 Compressed Air Preparation Filter Line Filter/Mist Separator/Micro Mist Separator AFF/AM/AMD Series RoHS Symbol Micro Mist Separator Mist Separator Line Filter AFF/AM/AMD AMK Modular Connection Example 1 2 1 2 L L How to Order AFF AM AMD AFF 30 03 BD D Option/Semi-standard: Select one each for a to g.
) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B
) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal
Parts description of the magnet gripper MHM-25D-X7400A-DTP-(N/P) Hexagon socket head cap screw M6x23 Auto switch D-M9(N/P) Magnet gripper Adapter plate Hexagon socket head cap screw M4x35 Exhaust throttle valve with silencer ASN2-M5-X937 Positioning pin 3x6 3 port solenoid valve V114-5LU Hexagon socket head cap screw M4x12 ISO9409-1compliant Conversion cable Hexagon socket head cap screw
or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/
Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N P P P p p IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P P P P p p 2-wire 12 V M9B P P P p p 3-wire (NPN) 5 V, 12 V M9NW P P P p p IC circuit 3-wire (PNP) M9PW P P
A l l o w a b l e U p p e r 6. Allowable Upper Temp. Range Setting range : 0.1 to 10.0 C Min. increment : 0.1 C Indicated content : Temp. from target to upper limit T e m p . R a n g e M O D E < 1 . 5 C (Ex.: 1.5 C) Function : Sets upper limit of temp. where the warning arises. The difference between target temp. and upper limit temp. should be input.
2)R,NPT 23 (R,NPT) Nm Rc 1/8 35 Rc 1/4 812 3) 4) 5) 23 & 6 No.SYJ300-OMU0003 SYJ Series 5 DC 30N () 5 1) 2)1()ISO VG32 2 ISO VG32 (MSDS) IP65IP67IEC60529 IP65IP67 7 No.SYJ300-OMU0003 SYJ Series 5 1 ()ISO VG32 2 ()ISO VG32 30 ( ) , 8 No.SYJ300-OMU0003 SYJ Series AC200V,AC220V L,MAC DC AC200V,AC220V ,, [] [] SYJ3000,5000,7000 3 SYJ300050007000SYJ300500700 3 SYJ300-P.17 SYJ500
Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.
or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/
or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/