Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread)

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Clamp Cylinder with Lock Series CLK1

1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

, 11 P.12 to P.15 P.1, 2 P.3, 4 P.5 to 9 P.5 to 9 Adsorption is possible even on a slanted surface.

LEF-OM006xx

16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

HRX-OM-W058

Applicable model HRS0 -A -20-T-R Rated flow (50/60 Hz) Note 1),2) L/min 10 (0.35 MPa) /14 (0.35 MPa) Maximum flow rate (50/60 Hz) L/min 17 / 20 Pump Maximum pump head (50/60 Hz) m 70 Output W 610 Recommended earth leakage breaker capacity A 15 Cooling capacity Note 3) W The cooling capacity reduces approximately 300 W from the value in the catalog Note 1) The capacity at Thermo-chiller outlet

MHF2

1 w u !7 @0 !2 !5 o !8 y !9 !4 r t e !6 Parts list Parts list Note Material No. Description No.

IDX-OM-W010

2 1 L N PE RUNNING ALARM 3 TB 2 1 L N PE MC MC TDR TDR ILS TDR ILS TDR MC MC OLR OLR MC MC MC CM MC CM PTC PTC PRS C11 FM FM PRS P P TDR MC TDR MC IDF11E-10-T IDF11E-20-T AC200/200,220V (50/60Hz) AC100/100,110V (50/60Hz) PE 2 RUNNING ALARM 3 1 N L RUNNING ALARM 3 1 N L PE 2 TB TB MC MC TDR ILS TDR ILS TDR MC TDR MC OLR OLR MC MC CM C01 CM MC PTC MC PTC C11 FM C11 FM PRS PRS P P MC TDR MC

Sine Rodless Cylinder Series REA

operating pressure Lo Fn W Guide First tentative bore size determination F3 D1.6 x P First tentative bore size determination F2 D1.6 x P First tentative bore size determination F1 D1.6 x P WB Inclined operation W+WBWV PPV W + WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Motor output [W]/Size [mm] 100/40 200/60 Motor type AC servo motor (100/200 VAC) Electric specifications Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled. Contact SMC when replacing component parts.

Compact Cylinder

Applicable bore size (mm) Model Port size Weight (g) Effective area (mm2) 32, 40 17 ASN2-M5 M5 x 0.8 1.8 5 50, 63 ASN2-01 3.6 1/8 4 Series CVQ Compact Cylinder With Solenoid Valve Construction With boss in head end e r t !0 !4 !2 u !3 o !1 w i q !5 y 50, 63 Basic Type Description No. Material Component Parts Rod end male thread Note !

HRX-OM-Z002

Fig. 9-17 Pump capacity diagram (Option P) 9.7 Heating capacity Model No.HRLE050-A-20 50Hz 60Hz Fig. 9-18 Heating capacity(HRLE050-A-20) 9.7 Heating capacity HRLE Series 9-16 HRX-OM-Z002 Chapter 9 Documents Model No.HRLE050-W-20 50Hz 60Hz Fig. 9-19 Heating capacity(HRLE050-W-20) Model No.HRLE090-A/W-* 50Hz 60Hz Fig. 9-20 Heating capacity(HRLE090-A/W-*) HRLE Series 9.7 Heating capacity 9-

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)