Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 117.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 117.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 117.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, 78 lb

Air Slide Table

m [kg] V = 50 1.5 V = 100 V = 150 1.0 V = 200 0.5 0.0 0 20 40 60 80 100 120 140 Allowable overhang L [mm] MXQ16(A)-10, 20, 30Z MXQ16(A)-40, 50Z 4.5 4.5 V = mm/s V = mm/s 4.0 4.0 3.5 3.5 Load mass m [kg] Load mass m [kg] V = 50 V = 50 3.0 3.0 V = 100 V = 100 2.5 2.5 V = 150 V = 150 2.0 2.0 1.5 1.5 V = 200 V = 200 1.0 1.0 0.5 0.5 0.0 0.0 0 10 20 30 40 50 60 70 80 90 0 10 20 30 40 50 70 60 Allowable

One-touch Fittings

P.103 Dimensions P.105 Made to Order/Clean Series/ Spare Parts P.131 M R Rc UNF NPT Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni P.101 Metric 2 3.2 4 6 8 10 12 16 V V V V V V V V How to Order P.134 Variations P.135 Dimensions P.137 Made to Order/Clean Series/ Spare Parts P.156 Sealant/Gasket

Modular Design with Uniform Body Style

MPa V V V V V 6*1 0.1 to 0.6 MPa v v v v v + Port size IN OUT OUT q e Semi-standard Nil 0.5 m V V V V V b Lead wire length r L 3 m V V V V V Z 5 m V V V V V + c Pressure unit of the scale plate Nil MPa V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

AC Servo Motor Driver (Network card type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

Air Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

15

SANMOTION R R2 V V OMRON Corporation Sysmac G5 R88M-K V V Panasonic Corporation MINAS-A4 MSMD V V MINAS-A5 MSMD/MHMD V V FANUC CORPORATION is V V (1 only) V NIDEC SANKYO CORPORATION S-FLAG MA/MH/MM V V KEYENCE CORPORATION SV SV-M/SV-B V V FUJI ELECTRIC CO., LTD. ALPHA5 GYS/GYB V V FALDICGYS V V ORIENTAL MOTOR Co., Ltd.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Air Cylinder

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Grommet 2-wire 12 V M9BV M9B V V V v v Connector H7C V V V V Terminal conduit

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Symbol Type Motor mounting position Top/Parallel In-line LER Nil Ends tapped/ *2 Body bottom tapped V V LEH L Foot V F Rod flange *2 V *4 V G Head flange *2 V *5 D Double clevis *3 V LEY -X5 11LEFS 11LEJS !1 Cable type !2 Cable length [m] !

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto Switch Internal Circuit 0.5 8 8 7 D-M9NW/M9NWV 1 14 14 13 Lead wire length (m) 3 41 41 38 DC (+) Brown 5 68 68 63 Main circuit of switch OUT Black How to Order D-M9 N W V L DC () Blue Series Lead wire length D-M9PW/M9PWV Nil 0.5 m M 1 m L 3 m Z 5 m Nil In-line V Perpendicular Wiring/Output type DC (+) Brown Electrical entry N

24

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P v v 2-wire 12 V M9BV M9B v v Solid state auto switch 3-wire (NPN) 5 V,12 V M9NWV M9NW v v IC circuit 3-wire

Air Cylinder

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Applicable bore size 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) 20 to 63 80, 100 Perpendicular In-line In-line Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) G59 V V v v 3-wire (PNP) M9PV M9P V V V v v G5P V V v v 5 V, 12 V

EX120/121/122

Output unit How to Order EX510-FC 10 10.16 0.40 Cable length (L) 01 02 05 10 20 60 1 m 2 m 5 m 10 m 20 m 60 m Brown: +24 V Black: Communications + White: Communications Blue: 0 V L Note) (Reference: AWG18) Note) Branch cable length is a maximum of 20 m. Use the cable by cutting it into lengths of 20 m or shorter. w Branch connector (Unit 1 pc.)

Table of Contents

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.