Guide Table Series MGF ø40, ø63, ø100 1

Operating pressure: P (MPa) 3. Weight of total loads: Wo (kg) Wo = (Load weight: WA) + (Jig weight: WB) 4.

MHK2

P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Electroless nickel plated Brass Body B w Electroless nickel plated Brass Body A e Electroless nickel plated Brass Needle r Electroless nickel plated Brass Lock nut t Electroless nickel plated Brass Handle y HNBR U seal u Electroless nickel plated Brass Needle guide i NBR O-ring o NBR O-ring !0 Chromium bearing steel Steel ball !

MHK2

4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

ARJ310

5 q u o Material Note Parts list !

Stainless Steel Heat

Printed in Japan. 1st printing May, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Clean Room Regulator/Fluoro Resin Type Series SRF30

6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

Base Mounted Wiring: 20 (Individual Pilot EXH), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 03 (3/8), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01CU (Base Mounted Plug-in w/Multi-connector on U Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01CU (Base Mounted Plug-in w/Multi-connector on U Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 12 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 9 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01FU (Plug-in w/D-sub Connector, U Side Mtg, Unit Style), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)