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Fig. 13 34 - External stopper If the kinetic energy that is generated by the load exceeds the actuators threshold value, an external dampening function must be provided to absorb the energy. Mounting position of external stopper Installing the stopper near to the centre of the table should be avoided.

Yes No YES SET 34 - AX IS. PosnJOG 1 Status ServoOFF Posn 23.45mm SET:Save Posn SET PLC OK PLC SET SET 35 - 5.4 2 1LECPA 5.4.1 2 PLC 5.4.2 PLC 5.21 5.22 5.4.1 (1) LECPA TB Ver2.1*LECPA MENU TEST DATA TEST MONITOR ALARM JOG SETTING SET PLC SET ON OFF YESSET YESSET Step No.SET AX IS.

) RESET ON OFF (2) (3) () OFF 04 OUT4 05 OUT5 06 07 ON 08 BUSY () BUSY OFF BUSY ON50ms 09 SVRE OFF OFFON ON 0A SETON SETON()ON OFF 33 - INP ON (BUSY OFF) ON ON ON ( ) INP ON 0B INP ()100 80 40(*1) *1 () INP [ON] 100 80 40 12 ON 0C AREA W 1W 2 ON 0D WAREA ONOFF EMG 0E ESTOP OFFON 0F ALARM 101A CC-Link ONOFF (CPU WDT ) 1B READY () () 1C1F CC-Link 202F 303A CC-Link 34

, US, SS5V2 BUILT IN FITTING 1/4), 3.38041 lb, Model1, 5, 34, 2 (P,EA,EB)(A,B)bCvbCvSS5V2-16C10C82.30.280.502.70.180.56

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2

special screws) 3 3 6 6 2-2H9 +0.025 0 depth 2 10 10 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 22 12-3-12 13 Series MHF2 Low Profile Air Gripper Dimensions MHF2-8D1 2.5H9 +0.025 0 depth 2.5 28 2.5H9 +0.025 0 depth 2.5 MHZ MHF MHL MHR 2-M3 x 0.5 thread depth 7 Mounting thread MHK 3.4 40.3 3 MHS MHC 32 48 2-M3 x 0.5 thread depth 4 Mounting thread MHT 15.8 34

12.5 8 7 6 18 Width across flats 8 (4 locations) 15 31 20 K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51 26 56 76 100 24 80 MHL2-10D1Z 54 52 67 42 78 118 142 39 108 MHL2-10D2Z 72 70 85 60 96 156 180 57 146 J dimension is at fully closed.

MA DA 3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) Model A 5 4.7 MHR3-10R MDHR3-10R 535 MHR3/MDHR3 Series Nominal Size 15 Without auto switch: MHR3-15R 3 x M3 x 0.5 thread depth 6 P.C.D.29 (Mounting thread) 120 120 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 53 34 12h9 0 0.043 1.5 5 20 43.5 (47) 2 5 6 2 3.5e8 0.020 0.038 Open: 13.5 Closed: 9.5 8 0 0.05

31 15 10 11 14 5 28 16 41 4 x M4 x 0.7 through (Thread for mounting attachment) 714 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion Type Dimensions MHW2-25D Flat finger type (Standard) 24 2 x M6 x 1 thread depth 10 (Mounting thread) 20 4 x M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27 2 x M6 x 1 thread depth 12 (Mounting thread) 34

MHK MHS MHC 42 58 45 30 MHT MHY 32 MHW 9 MRHQ +0.2 +0.1 23 2 34H9 +0.062 depth 4 0 27 Misc. 30 4-M6 x 1 thread depth 7 (Thread for mounting attachment) Rc 1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Caution on handling the fine-lock cylinder For details, make sure to refer to Fine Lock Cylinder (Series CLG1) on pages 9-2-27 to 9-2-34. 9-4-5 6 Series MLGC Construction: With Rear Plate View A-A' A' B' Ball bushing bearing View B-B' Front mounting flange style Long stroke Slide bearing Component Parts Description Black hard anodized Hard anodized Nitrided Hard anodized Description Rod cover

Digital Flow Switch Digital Flow Switch For Water P.60 P.61 Cylinder with Lock Double Acting, Single Rod Compact Cylinder with Lock Double Acting, Single Rod CDLQ 9091P.32 90-RSDQ 90-RSH/RS1H Stopper Cylinder/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34

4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5

D-F9NW Auto Switch Weights DC (+) Brown [Red] Unit: g Main circuit of switch OUT Black [White] Model D-F9BW D-F9PW D-F9NW Lead wire length 0.5m 7 7 7 Lead wire length 3m 32 34 34 DC () Blue [Black] Auto Switch Dimensions D-F9PW D-F9NW, D-F9PW, D-F9BW DC (+) Brown [Red] Main circuit of switch OUT Black [White] DC () Blue [Black] D-F9BW OUT (+) Brown [Red] Main circuit of switch OUT () Blue

Main switch circuit Main switch circuit Black lead wire + Resistor DC power supply Load Reed switch Reverse current prevention diode OUT Black [White] () OUT () Blue [Black] OUT () Blue [Black] DC () Blue [Black] Indicator light/Display method Proper Auto Switch Mounting Positions Solid state switches A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34

Main circuit of switch OUT Black [White] 7 7 0.5 7 Lead wire length (m) 32 34 3 34 52 56 5 56 DC() Blue [Black] Dimensions D-F9PW(V) D-F9W M2.5 x 4 Slotted set screw DC(+) Brown [Red] Indicator light Main circuit of switch Main circuit of switch 2 2.7 OUT Black [White] DC() Blue [Black] 22 2.8 2.6 4 D-F9BW(V) Most sensitive position 6 DC(+) Brown [Red] D-F9WV M2.5 x 4 Slotted set screw Indicator

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Main circuit of switch Main circuit of switch OUT Black Weight DC () Blue (g) D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch model 0.5 7 7 7 D-F9PW, D-F9PWV Lead wire length (m) 3 34 34 32 DC (+) Brown 5 56 56 52 Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw DC () Blue Indicator light 2.7 2 D-F9BW, D-F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main circuit of switch Most sensitive

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.4 40.3 3 MHS MHC 32 48 2-M3 x 0.5 thread depth 4 Mounting thread MHT 15.8 34 5.9 E MHY 11 11 MHW 14 19 MRHQ E M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 Misc.