Precision Cylinder Series MTS 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02 12 Width across flats 14 With end lock 3 124.5 + Stroke
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5
64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY
(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4
Series VXD21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)
Series VXR21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting
90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33 44 46 60 53.3 30 41 50 50 70 2.3 2.3 2.8 2.8 3.2 3 3 3 4 4 12 14 19 22 22 67 79 79 108 6 Series VHS20/30/40/50 Series VHS2510/3510/4510/5510 Specific Product Precautions 1 Be sure to read before handling.
28 A B 50 5 5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.
Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.
22 Guide Cylinder Series MGG Basic style: MGGB 63 to 100 4-F through, counterbore G Bottom 4-H M N Bracket (Refer to the table below.)
The switch rail accessory type is mentioned on page 8-15-19, and can be ordered together with auto switches. (2) Refer to the separate disassembly instructions for switch magnet installation procedures. 8-15-22 22 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Port size Rc Material Surface treatment 22 10.5 62 46 17.5 3/8 BP-1S Zinc chromated SPCC 22 1/2 BP-2S 2.3 R3.5 27.5 3/4 BP-3S R22 92 2-A 118.6 108 OUT IN Mounting position 26 A FGD Series Made to Order Consult with SMC for details.
EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH
Seat material Material Code Material PCTFE (Standard) Vespel 2) No code VS Code Body material 316L SS secondary remelt Hastelloy C-22 S H 2) Not available with H material.
()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10. SI . 49 10.1. . 49 10.2. . 51 10.3. . 53 10.4. I/O . 53 10.5. I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11.
Hastelloy C-22 Hastelloy C-22 PCTFE Dimensions inch (mm) SL5500 2.12 (53.8) Max. 5.6 (142.2) 1.5 (38.1) 2.25 (57.2) IN OUT 0.69 (17.5) 2.00 (50.8) A 0.88 (22.4) Connections A inch (mm) FV4 MV4 TW4 FV6 MV6 TW6 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) (94.0) 3.70 (75.2) 2.96 (119.4) 4.70 (75.2) 2.96 Flow Characteristics SL5500 80 psig (0.55 MPa) Inlet pressure: 50 psig (0.34 MPa) SL5500
Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (
An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 22 Series CY1F Actuator Precautions 1 Be sure to read before handling. Precautions on Design Selection Warning Warning 1.