Fieldbus system EtherCAT compatible SI Unit

V1.1 , Restore -97No.EX-OMA1023 Enumeration data definion (continued) Index Value Text 1 Digital Input 0814 5 Power2 (Port classB) 0 One time switch off (PowerOffTime) 0815 1 Switch PortPowerOff (permanent) 2 Switch PortPowerOn (permanent) 0 NO_DEVICE 1 DEACTIVATED 2 PORT_DIAG 3 PREOPERATE 0816 4 OPERATE 5 DI_C/Q 6 DO_C/Q 254 PORT_POWER_OFF 255 NOT_AVAILABLE 0 VALID/PDOUTVALID 1 INVALID/

VM

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

ITV

Figure 1.

VCW

1 G 2 02 Q For water Option.

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19

Booster Regulator/Air Tank

VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A KT-VBA10A-1 KT-VBA20A-1 KT-VBA40A-1 KT-VBA22A-1 KT-VBA42A-1 KT-VBA43A-1 KT-VBA11A-20 Model The kit includes the parts from q to u and a grease pack. VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A Quantity Model No.

rep-filter-e

Remove case q by hand while supporting it, and remove the element together with case q. 1-5. Pull out element e from cover r. Since the PTFE seal is used, a certain amount of force may be necessary to pull out the element. If there is not enough space under case q, lower case q by about 100mm, and remove the element together with case q. 1-6. Dispose the removed element. 1-7.

Industrial Filters Replacement Procedure

Remove case q by hand while supporting it, and remove the element together with case q. 1-5. Pull out element e from cover r. Since the PTFE seal is used, a certain amount of force may be necessary to pull out the element. If there is not enough space under case q, lower case q by about 100mm, and remove the element together with case q. 1-6. Dispose the removed element. 1-7.

Compact

1 1 2N q w e r t y u i o !

AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

5 Port Solenoid Valve Series VQZ1000/2000/3000

How to Order Valve VQZ 1 5 1 1 1 5 M Series CE compliant 1 2 3 VQZ1000 body width 10 mm VQZ2000 body width 15 mm VQZ3000 body width 18 mm Nil Q CE marked Manual override Note) AC-type models that are CE compliant have DIN terminals only.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

EXxx-OMW0014CN

SI IP65 IP65 M12(5 ) . 9-2 EX245-LA1(A) / (TOP View) 1 L+ 24 V / US1 2 2 I/Q / US1 3 5 1 3 L0 V / US1 4 C/Q IO-Link DI DO / US1 4 5 N.C. 19.6. . 9-3 EX245-LB1(B) / (TOP View) 1 L+ 24 V / US1 2 2 P24 24 V / US2 3 5 1 3 L0 V /US1 4 C/Q IO-Link DI DO / US1 4 5 N24 0 V / US2 19.6. 58 No.EX-OMW0014CN-A 9.4.

Modular Type Filter Regulator Series AW

0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 58 AW10 to 40 Construction AW10 AW30, 40 AW20 w w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Modular/F.R.L. Units Series AC

Standard Specifications AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 AF10 AR10 AL10 M5 x 0.8 1/16 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/4 1 1 Model AF60 AR60 AL60 AF60 AR50 AL60 AF50 AR50 AL50 AF40-06 AR40-06 AL40-06 AF40 AR40 AL40 AF30 AR30 AL30 AF30 AR25 AL30 AF20 AR20 AL20 Component Air filter Regulator Lubricator Port size AC Pressure gauge port size Note 1) AF

&snac

c D e w P o i n t : T V 0 e V w i t n i n f t r q T O I l U L l N 0 t e 2 N o t e 3 _ I D G 3 * M , I D G 5 X M t O e e x V , l D G 5 l ( V N / o d e t t O O e l , I D Q E l o . e : k s ( 1 t l i t h A u t o D r a i n r 0 . 9 k s ) 1 .