VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

ML1

Consider q Max. payload, w static moment, e dynamic moment (when stopper collides) when calculating the Max. allowable moment and payload. Evaluate q and w as a (average speed), and e as (collision speed =1.4a). Calculate q (Wmax) from the graph of Max. payload (W1, W2, W3) and calculate w and e (Mmax) from the graph of Max. allowable moment.

LMU100/200 Series Mist Spray Unit

6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !0Supply pressure gauge !0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Clean Rodless Cylinder Series CYP

P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6

Turntable Cylinder Series MGT

45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 77 96.5 116 63 80 100 20 25 30 10 12 15 39 45.5

Compact Guide Cylinder End Lock Type SeriesMGP

Series MGP Dimensions 4-MM depth ML 4-OA through 4-OB depth of counter bore OL Section XX HA:T-slot for hexagon bolt Section XX Z WA L 4-YY depth YL 4-NN through Section XX DL X0.02 X T R X0.02 X0.02 DA VB VA H 24 11 PW X U DB End lock mechanism non-locking type manual release ( ) XAH7 depth XL XAH7 depth XL GC XAH7 depth XL 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke

Compact Hydraulic Cylinder Series CH
KGB

Stainless steel 9 With switch only Magnet plate Aluminum alloy 10 With switch only Switch mounting bracket 11 Scraper 12 With back-up ring Rod seal NBR 13 Piston seal 14 Tube gasket 15 Piston gasket 18 Series CHKGB Dimensions 2-Rc P F with effective thread depth G Q S Width across flats f c R D R a b g e H E C B + Stroke h + Stroke 4-K through J 8-L counter bore A + Stroke M Rod end male

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

IC

0 VEX IC-0(Internal sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 wire, O.D. 6.8 mm, 1 mm length AMR Pneumatic regulator connection cable 5 wire, O.D. 6 mm, 1 mm length q q Cable for 4 point switch output ITV 3 wire, O.D. 3.4 mm, 1 mm length Cable for external sensor

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.