Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 6 (600mm)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 3 Port, Universal, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 600mm, CE Compliant: -

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 600mm, CE Compliant: -

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

04 6 8 10 10 ZZM Stations 04B Effective area of external silencer is 160 mm2.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n i ( . n i M e l o h . a i D . t W ) f g ( . o N t r a P D L Q M 4 / 1 0 0 7 0 L R K 8 6 . 0 ) 2 . 7 1 ( 9 8 . 0 ) 5 . 2 2 ( 1 2 . 0 ) 3 . 5 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 8 / 3 0 0 1 1 L R K 9 8 . 0 ) 7 . 2 2 ( 0 1 . 1 ) 8 2 ( 6 2 . 0 ) 6 . 6 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 6 1 2 / 1 0 0 3 1 L R K 4 0 . 1 ) 5 . 6 2 ( 2 2 . 1 ) 1 3 ( 1 3 . 0 ) 8 . 7 ( 4 9 . 0 ) 4

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

IIIIIII

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Mechanical Valves Series NVM, NVFM, NVZNI

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

FSQ seies

(Nole 6) The ' ecl'on s sub cl lo the adlLst ng boll adjustment.

Air Cylinder RSQ Series Stopper Cylinder

(Nole 6) The ' ecl'on s sub cl lo the adlLst ng boll adjustment.

 

Construction Standard type Double acting type N.C. type N.O. type w e q q e w q e w y t r A B A B With flow rate adjustment u Component Parts No.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White

Micro Mechanical Valve Series VM1000

6 PE PE !0 e !5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

) M-5-4-P01 Cap nut C3604 (With electroless nickel plated) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 M-5-6-P01 200