Compact Type

7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Connector block assembly 7 Connector block assembly part numbers Connector specifications Part no.

IDX-OM-V020

Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT . 7-5 Chapter 8 Option A . 8-1 8.1 SAFETY INSTRUCTIONS FOR USE . 8-1 8.2 SPECIFICATIONS . 8-1 8.3 AIR PIPING . 8-1 8.4 AIR FLOW CAPACITY . 8-1 8.5 AIR/ REFRIGERANT CIRCUIT . 8-2 Chapter 9 Option C . 9-1 9.1 SPECIFICATIONS . 9-1 9.2 PRECAUTIONS

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

CLA

MM I """.0 40 -500 20-500 27 30 60 96 Yo V . 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 30 71 M14X1.5 M18X1.5 M1SX1 .5 M22X l .5 I 50 600 20-600 32 35 70 108 Yo V, 52 20 40 10 95 ' 7 27 59 13 12 M8X1.25 7 30 80 , 63 -600 20-800 32 35 86 11 5 Yo y. 64 20 40 10 102 17 26 67 18 15 Ml0Xl .25 7 40 99 ,. 80 -750 20 750 37 40 102 129 Yo Yo 78 25 52 14 11 3 21 30 72 23 17 M12X1.75 11 48 11 7 , 100

Vacuum Unit

stations Release valve 9 10 5 stations Release valve 18 Supply valve Supply valve 6 11 12 6 stations Release valve 6 stations 19 Release valve 7 Supply valve 13 14 Supply valve 20 7 stations Release valve 7 stations Release valve 8 15 16 Supply valve Supply valve 21 8 stations Release valve 9 8 stations Release valve 17 18 22 Supply valve Supply valve 10 19 20 9 stations Release valve 9 stations

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

7 !8 !

RHC

Cylinder stroke (mm) Refer to Stroke on page 10-6-7. Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

JXCx-OMT0001CN

-70No.JXC-OMT0001CN-C 10.6 1 2 1.P.108 3 4 5 6 7 1 8 -71No.JXC-OMT0001CN-C )100mm/s 200mm ( No.0 ) Area 1 Step No.

JXCx-OMT0028CN

No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm

MQQ

5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5

SZ3000

Refer to page 1-7-4.)

SZ3000

Connector block assembly 7 Connector block assembly part number table Connector specifications Part No.

Rotary Actuator

7 !4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) L2 Y Size (mm) 10 X L1 3 to 8 5 ( 8 Y) to (Y 1) Size 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 ( 9 Y) to (Y 1.5) Y = L1 = 15 20 5.5 to 18 10 (18 X) to (X 1.5) 3 to 10 7 (10 Y) to (Y 1.5) L2 = 20 30 7 to 20 10 (20 X) to (X 1.5) 5 to 13 8 ( 13 Y) to ( Y 2) X = 30 40 7 to 22 10 (22 X) to (X 1.5) 7 to 15 9 (15 Y) to (Y 4.5) Symbol: A11 The long shaft can be further

Possible to transfer a workpiece at low-speed.

A33 A34 A43 A34 A37 C 7 C 7 C12 C11 C12 -X 6 -X 6 Chart 3, 4, 5 Chart 3, 4 Chart 4, 5 Combination is available only when all the conditions are fulfilled among the nation chart above.

Compact Cylinder with Air Cushion

7 7 8 7 8 8.5 8 9 D-F7LF D-F9, F9V D-F9W, F9WV D-F9BAL 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

33

L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass, Ceramic, Carbon, PP , PE, POM, EPDM, PVC Power supply Single-phase 100 VAC 50/60 Hz Allowable voltage range 10% Fuse A 15 Power cable size Note 10

Slider Type Ball Screw Drive/11-LEFS Series

1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

LEC-T1_C

(3-3) LECPLECA .59 (3-3-1) LECPLECA . 61 (3-3-2) LECPLECA . 62 (3-3-3) LECPLECA . 64 2 - (4) .68 (4-1) .68 (4-2) .68 (4-3) .69 (4-3-1) . 69 (5) .70 (5-1) .70 (5-2) .70 (5-3) .70 (5-3-1) . 70 (5-3-2) . 72 (5-3-3) . 73 (5-3-4) . 76 (6) .79 (6-1) .79 (6-2) .79 (6-3) .79 (6-3-1) . 79 (6-3-2) . 80 (6-3-3) . 82 (6-3-4) . 83 (6-3-5) . 83 (7) .84 (7-1) .84 (7-2) .84 (7-3) .85 (7-3-1) . 85 (7-3-