VQZ1000/2000/3000

26.5 20.5 13.5 13.5 11.5 SMC 9 9 M5 x 0.8 (Not applicable to standard.)

HEC_W-E

1 ALARM INDICATION IN THE EVENT ERR14 ARISES-9-2 FIG. 9-2 ALARM INDICATION IN THE EVENT ERR14 ARISES DURING PB RANGE SETTING INPUT -9-2 FIG. 9-3 ALARM INDICATION IN THE EVENT TEMP.

Cylinder with Lock

7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

SV

Refer to Precautions 2 on page 1-2-9.

Title not found

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

Modular F.R.L. Units

*9 *9 *9 *9 *9 ZA*8 Digital pressure switch: With unit selection function *10 *10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

. 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 / 1 1 4 / 1 1 0 0 9 F L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

ZP

Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

HRX-OM-W060

8.5.1 HRL100A20 CH1 . 8-9 8.5.2 HRL200A20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20 CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13 8.8 Daily Check Sheetheck Sheet . 8-14 Chapter 9 Product Warranty . 9-1 HRL Series HRX-OM-W060 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using the product, be

AC Servo Motor Driver (CC-Link Type)

is displayed. -9 to 9 mm 10STM 4 Point table No.

AC Servo Motor Driver (CC-Link Type)

is displayed. -9 to 9 mm 10STM 4 Point table No.

Rotary Actuator

9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

RLQ

For detailed specifications, refer to page 9-15-1.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

NPN PNP CN4 Power supply 24 VDC for I/O signal Power supply 24 VDC for I/O signal CN4 1 1 COM+ COM+ COM COM 2 2 Load Load 3 3 OUT0 OUT0 Load Load 4 4 OUT1 OUT1 Load Load 5 5 OUT2 OUT2 Load Load 6 6 OUT3 OUT3 Load Load 7 7 BUSY BUSY Load Load 8 8 ALARM ALARM 9 9 IN0 IN0 10 10 IN1 IN1 11 11 IN2 IN2 12 12 IN3 IN3 13 13 RESET RESET 14 14 STOP STOP Input Signal Output Signal Name Details COM+