Serial Transmission System Series EX250 Series EX500

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE

REC

0 1 1 Carbon tooling steel Nickel plated Aluminum alloy Hard anodized Cylinder tube Retaining ring e !1 2 1 Urethane Aluminum alloy Chromated Piston Bumper r !2 1 1 Resin Hard chromate plated Stainless steel Piston rod Magnet t !3 1 1 Carbon steel Zinc chromated Hexagon socket head screw Bushing Sintered oil-impregnated beaning y !

VT317

Component Parts Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. Caution 1. Since this valve has slight air leakage, it can not be used for vacuum holding (including positive pressure holding) in the pressure container. Specifications different from standard are as follows.

A

R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000

3M/SMseries

(T), OIN connector(D) Surge Voltage Suppressor Circuil U GS "--ffi_=r e+--,-1 *"-,..01$A|l ilrr i*Ti $i= *Ejlll,o .itJj rljo Lamp, Surge Voltage Suppressor Circuit E7, rZ, DZ EZ, rz, Dz (OOV o. more.l (Less than 24V) Surge Voltage Suppressor Circuit il*ffir.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

I

(T), OIN connector(D) Surge Voltage Suppressor Circuil U GS "--ffi_=r e+--,-1 *"-,..01$A|l ilrr i*Ti $i= *Ejlll,o .itJj rljo Lamp, Surge Voltage Suppressor Circuit E7, rZ, DZ EZ, rz, Dz (OOV o. more.l (Less than 24V) Surge Voltage Suppressor Circuit il*ffir.

44

Construction e q r q q Principal Parts Material No.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position)

CQM

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Digital Gap Checker

0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Inlet pressure (MPa) Weather resistant NBR Diaphragm assembly e 1315510A Flow Characteristics Inlet pressure: 0.7 MPa Valve assembly Valve spring Valve mini Y packing O-ring O-ring Handle Set nut Brass, HNBR Stainless steel NBR NBR NBR Polyacetal Zinc die-casted r t y u i o !

Soft Start-up Valve AV2000/3000/4000/5000

R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

NGIP seies

Part No. cD-P11 cD,p12 Load voltage 100 vAC ziovac 24VDC 2smA 12.5mA 5omA Inch Contacl Proleqtion gox/Dimensions 0.80 1_20 1.40 ot7,.., 15 iffiqffi Hou To MountThe Auto Stoitch fllL_ #F*t-q -s-ffi*""*"-'" *-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP

Series VCL

R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VXZ

, NBR u Stainless steel, NBR r Stainless steel i o !