Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

PFxx-OMO0004CN

NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3 4 5 DIN F02(G/14)DIN -12No.PF-OMO0004CN-E (OUT) (IN) 1 2 2 INOUT DIN 1 2: LCD LED (UP) (SET) SET (DOWN

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Vacuum Equipment

If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'. Thus, if the leakage volume is 30 /min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 /min (ANR), the S type can attain a higher vacuum pressure.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

pilot port) 25 27 5 A4 B2 Insulation Black () 28.5 PE A B 47 57 X Insulation Red (+) 3EB 1P 5EA 96.5 27 69.1 25 1/8" (Pilot EXH. port) 210.7 76.5 L (Lead wire length) 1.55 0.3 mm2 80.5 (For E type) 34 17.5 15.5 29.5 29.5 5 x 3/8", 1/2" (Piping ports) 44.5 113.6 L plug connector with cover (LL) 3 52-SY9440 (R) -LL03 04 200 L 5 (Lead wire length) Insulation: Red (+

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Material Note Description Body Needle Bottom cover Handle Component Parts Chromated Aluminum alloy Brass Aluminum alloy Zinc alloy q w e r No. Description Material Note Body Valve guide Check valve Needle Handle Chromated Chromated Rubber lining Chromated Black painted Aluminum alloy Aluminum alloy Brass Brass Carbon steel q w e r t AS Replacement Parts ASP No. Description Part no.

AMC

AMC CA A 3 Body size Thread/Applicable to drain piping 2 AMC220 AMC310, 320 AMC510, 520 AMC610 AMC810 AMC910 Rc(PT) 3 5 6 8 9 N NPT Exhaust of oil mist F G(PF) A Drain cock (Standard) D Drain piping Note 1) On the type for the AMC220, an R(PT) fitting can be attached by removing the drain cock (It becomes the drain piping style).

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Precision Clean Regulator Series SRP

C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Precision Clean Regulator

.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 VEX Knob Gauge port SRH R: R specifications Symbol Gauge port SRP SRP OUT IN SRF Gauge port positions are indicated with the knob on the top side.

Exhaust Cleaner Series AMC

AMC520 12 16 55 Note 1) On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Siiiil"Tivrc

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

Speed Controller with

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Option Manifold Plug-in unit 1 Option None Symbol Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

/80 to 60C (1)61760.74100, 200, 110 to 120, 220 VAC (50/60 Hz), 240 VAC (50/60 Hz) 12, 24 VDC?

/80 to 60C (1)1131321.60100, 200, 110 to 120, 220 VAC (50/60 Hz), 240 VAC (50/60 Hz) 12, 24 VDC?