M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 !

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.

SMC Wireless System PROFINET compatible

(Valve manifold not connected Refer to page 19) Mount the valve plate (EX600-ZMV#) to the valve manifold using the set screws (M3 x 8) provided with the product. (Tightening torque: 0.6 to 0.7 Nm) Screw mounting places SV: 2 places S0700: 2 places VQC1000: 2 places VQC2000: 3 places VQC4000: 4 places SY: 2 places (5) Connect the wireless unit to the valve manifold.

SMC Wireless System EtherNet/IP ® compatible

(Valve manifold not connected Refer to page 19) Mount the valve plate (EX600-ZMV#) to the valve manifold using the set screws (M3 x 8) provided with the product. (Tightening torque: 0.6 to 0.7 Nm) Screw mounting places SV: 2 places S0700: 2 places VQC1000: 2 places VQC2000: 3 places VQC4000: 4 places SY: 2 places (5) Connect the wireless unit to the valve manifold.

5 Port Air Operated Valve

] 2 x 4.3 (For mounting) 2 x 4.3 (For mounting) 25.5 10 SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 2B 2B VZA (1.6) 66 23 19 81 VFA VFA 71 (6) 1/8 [Pilot port: Lateral (-P)] VFRA 1/8 [Pilot port: Lateral (-P)] VPA4 (45) (55) 31.5 31.5 36 36 SYJA 35 17.5 17.5 7 7 VZA 20.5 2 x 4.2 (For mounting) 20.3 20.5 2 x 4.2 (For mounting) (16) 2 x 5.5 VTA

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

Compact

Origin Note 2) Origin Note 2) When LECP2 is used.

modular-press-e

AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF

Modular F.R.L. Pressure Control Equipment

AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

100

2 !3 !

Fieldbus system PROFIBUS DP compatible SI unit

System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No.

IZx-OMP0064

Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3. Routing of cables . 2-4. Transition wiring of ionizer . 3. Descriptions and Functions of the Panel . 4.

Refrigerated Air Dryers

Terminal block for power supply Drain tube Terminal block for signal 127 479 Y-shaped strainer 1/2 (Accessory) 712 2 20 735 Drain tube (O.D. 10, Length approx. 2 m) (Can also be connected on the other side.) 40 752 700 1 107 Facility water inlet R1/2 64 75 Facility water inlet R1/2 (When symbol 4 is specified.)

PEEK

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 LVM10R4 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 LVM10R6 N.O. N.C. 3 2 1 25.5 (16) N.O.

OMR0032

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Lead wire length) 300 (Lead wire length) P = 19 Manual override 2-M5 x 0.8 2-M5 x 0.8 2-5.3 mounting hole 2-M5x0.8 S070 23 (Nonlocking) 18 10 4.4 With light/surge voltage suppressor VQ 19 38 VKF 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 R side VQZ VZ VS n: Stations Stations Symbol Formula L1 = 19n + 12 L2 = 19n + 40 10 202 230 9 183 211 8 164 192 7 145 173 6 126 154 5 107 135 4 88 116 3 69 97

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) For others, refer to ejector specifications on page 17. Construction Material Component Parts e r Description No. Poppet valve assembly for supply valve Poppet valve assembly for vacuum release valve Vacuum release flow adjusting needle Aluminum alloy 1 2 3 t w y Part no. Replacement Parts q Material Refer to page 19. XT534-5-001-AS Refer to page 19.

Rotary Actuator/Vane Style Series CRB2

Stopper ring Block CRJ CRA1 CRQ2 Stopper ring Block Block Block MSQ Counterclockwise Counterclockwise 2> 2-2> MSZ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.