Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

A

I L S C R A P E R X C 3 5 O P T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S

2

INDEX 166 Series AF10-A to AF60-A Dimensions AF10-A/AF20-A AF50-A/AF60-A D U M J N T Bracket (Option) S Bracket (Option) R R B C V Q OUT IN J M U S N T 2 x P (Port size) D R V Q B C IN OUT Clearance for maintenance G Drain A AF30-A to AF40-06-A N T J M 2 x P (Port size) Bracket (Option) U D S V Q IN OUT B C 2 x P (Port size) Clearance for maintenance G Drain A E Clearance for maintenance

Table of Contents

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Table of Contents

20, 25, 32, 40, 50, 63 How to Order Y7BW 300 25 G L S MY1M Number of auto switches Slide bearing guide type Nil S n 2 pcs. 1 pcs. n pcs.

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

CV/MVGQ

2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side RS H A 15 90 100 110 35 100 100 100 100 1 Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2,

Table of Contents

H7BW 32 100 L R Number of auto switches Bearing type M L Slide bearing Ball bushing bearing Nil S n 2 pcs. 1 pc. n pcs.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

type) 1 2 position single 2 2 position double 3 3 position closed center 4 3 position exhaust center 5 3 position pressure center For AC voltage valves, there is no "S" option.

Electric Actuators

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

LEC-OM02704CN

i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6

SY

Note 2) For AC, there is no "S" specification, since it is integrated with the rectifier.

Table of Contents

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2