1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21

1

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Valve Type: 31 (N.C. Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT)

Valve Type: 31 (N.C. Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT)

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link S kit 1 to 8 stations 16 stations 16 1 to 4 stations 8 stations 8 D side 1 to 8 stations 16 stations 16 Serial transmission kit EX140 Integrated-type (For Output) Serial Transmission System

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

DIN terminal 4-15-4 5 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Dimensions: Body Ported 1 2 1 2 Grommet: VZ2 2-GH(S)-M5 With foot bracket: VZ2 2--M5-F 2-2.8 mounting hole 2-3.5 mounting hole M5 x 0.8 Pilot EXH V100 Manual override (Non-locking) SY Manual override (Locking type (Manual)) Manual override (Locking type (Tool required)) SYJ G: 300 H: 600 Lead wire

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-49 8 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tubing O.D.

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Air Cylinder NCM Series Stainless Steel Cylinders

"C" must be included at the end of this part number. o slrc' Air Cvlinder Stain]esJ Steel Cylinder Series NCM Single Acting Spring Return /Spring Extend DITENSIONS NC BO-OS NCilCO-OS F 1.69 1.56 *o T'ICMBO.OT |-1 rr"" o*"-\H @ slrc' Series NCM Air Cvlinder Stainles J Stcel Cytinder DirectMount .

CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

Clamp Cylinder with Lock Series CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

&snac

H a r m f u l s u b s t a n c e s D G 3 H D G 3 H M D G 3 H V D G 5 H D G 5 H M D G 5 H V I i M E M B R A MEMBRANE A I R D R Y E R R DRYER UN I T N E A I B e f 0 r e . 0 p e r a t i n g , y 0 u s h 0 u l d f i r s t t h o r o u g h l y r e a d t h i s m a n u a l . K e e p t h i s i n s t r u c t i o n r n a n u a i .