II Rod packing NSR I 50 63 MOH-20 DRP-20S NLP-50 NLP-63 @I Piston packing NBR NLP-40 fD Tube gasket NSR CM-040-16-127 Il!
Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.
Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.
Size SCFM 50 PSI 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 1/2" ID 20 1.8 1.3 1 0.9 0.8 0.7 0.6 30 5 4 3.4 2.8 2.4 2.3 2 40 10.1 8.4 7 6 5.4 4.8 4.3 50 18.1 14.8 12.4 10.8 9.5 8.4 7.6 60 23.4 20 17.4 14.8 13.3 12 70 28.4 25.2 22 19.3 17.6 80 34.6 30.5 27.2 24.6 3/4" ID 20 0.4 0.3 0.2 0.2 0.2 0.2 0.1 30 0.8 0.6 0.5 0.5 0.4 0.4 0.3 40 1.5 1.2 0.9 0.8 0.7 0.6 0.5 50 2.4 1.9 1.5 1.3 1.1 1 0.9
Size SCFM 50 PSI 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 1/2" ID 20 1.8 1.3 1 0.9 0.8 0.7 0.6 30 5 4 3.4 2.8 2.4 2.3 2 40 10.1 8.4 7 6 5.4 4.8 4.3 50 18.1 14.8 12.4 10.8 9.5 8.4 7.6 60 23.4 20 17.4 14.8 13.3 12 70 28.4 25.2 22 19.3 17.6 80 34.6 30.5 27.2 24.6 3/4" ID 20 0.4 0.3 0.2 0.2 0.2 0.2 0.1 30 0.8 0.6 0.5 0.5 0.4 0.4 0.3 40 1.5 1.2 0.9 0.8 0.7 0.6 0.5 50 2.4 1.9 1.5 1.3 1.1 1 0.9
(17.5) 2.00 (50.8) 20 0.14 10 0.07 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy
I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.
50 SUP=0.5MPa SUP=0.5MPa Total lifting range m Total lifting range m 40 40 Air consumption 100l/min (ANR) 30 Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000
50 SUP=0.5MPa SUP=0.5MPa Total lifting range m Total lifting range m 40 40 Air consumption 100l/min (ANR) 30 Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example
(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.
to 50 kPa. 16-3-34 3 Series PSE550 Low Differential Pressure Sensor Analog Output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] ZSE ISE 1 4 PSE 0 2 0 2 Differential pressure [kPa] Differential pressure [kPa] Z I SE3 Internal Circuit PS Z I SE1 2 PSE550 Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE550-28 Current output type 4 to 20 mA Allowable load impedance
Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.
mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm
Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass
Set the unit with the or button. : kPa or MPa : kgf/cm2 : bar : psi : inHg : mmHg Note 1) Note 1) Note 1) Calibration is available with series ZSE50 and ZSE60. 16-2-43 20 Series ZSE F/ISE Pressure Switch Precautions Be sure to read before handling. 50 60 50 60 Pressure Source Handling Warning Warning 1. Do not drop, or apply excessive impact (980 m/s2) while handing.
50 Nil Without option H 20 24 30 to to B With lock A 12 16 20 1200 1200 B 6 8 10 *Refet to Applicable Stroke Table.
A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical
Green LED lights up Indicator light Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) 2.3x 10-4in2 (0.15mm2) x 3 cores (Brown, Black, Blue) 2.8x 10-4in2 (0.18mm2) x 2 cores (Brown, Blue) Note 1) Refer to page 50 for auto switch common specifications. Note 2) Refer to page 50 for lead wire lengths.
74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement
l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?