3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Compact and

rate 40 40 40 10 10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 16 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] ZU07SA Exhaust Characteristics Exhaust Characteristics Flow Rate Characteristics Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

NCY2 series

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

Clean Regulator/Fluororesin Type

42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80 Pilot port Rc, NPT 1/8 12 R 132 100

Clean Air Module

L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60 0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 400 400 300 0.2 MPa 300

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

NCA1

Piston Speed Cushion Mounting types Air 250 psi (1.75 kgf/cm) 8 psi (0.06 kgf/cm) 40 ~ 140F (5 ~ 60C) 2 ~ 20 inch/sec (50 ~ 500mm/sec) Air Cushion Standard Basic, Foot, Flange, Center Trunnion, Side Tapped 3 positions can be obtained from a single cylinder.

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

VXF

350 0.7 DC DC VXF 2160 5 to 60 580 VC 1.0 AC AC 10 to 60 VXF2160 VXFA2160 1.0 0.03 330 2.0 1 27 VXFA 2160 5 to 40 400 0.7 DC DC VDW Solenoid type VXF 2280 5 to 60 1.0 1500 AC AC VXF2280 VXFA2280 VQ 10 to 60 1.0 0.03 810 2.0 40 1 2 1 VXFA 2280 5 to 40 0.7 1300 DC DC VX2 Note 1) Dew point shall be 10C or less.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

AMF

40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering, Inc.-230

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

3-Position Rotary Table

type) Displacement m Displacement m 200 200 150 150 130 120 50 50 MSZA30A (High precision type) MSZA50A(High precision type) D70 60 50 40 30 20 10 0 120 100 80 60 40 20 0 Load N Load N 291 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching

CU

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 2.00 25 1.50 20 1.00 0.50 0.00 20 30 40 50 60 70 80 90 100 Stroke (mm) Cushion Needle Adjustment Caution : Operating pressure 0.5MPa : Operating pressure 0.4MPa Graph 1 1.

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

Process Valve

28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.