3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 80 Compact Cylinder/Water Resistant: Double Acting, Single Rod Series CQ2 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction Standard (40 to 100) !2 !3 !1 !0 !3 !3 !2 !1 Without Auto Switch With Auto Switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205).

VVX31/32/33

(C ) Temp. conditions Power source Vacuum 60 10 Air Response Characteristics 40 AC/DC Maximum Minimum AC/DC 20 Response time (msec) Switching Signal ON OFF Model Power source Tightness of Valve (Leak rate) 60 or less DC VX31 40 or less 50 or less AC 40 or less 40 or less DC 50 or less 40 or less AC 50 or less 60 or less DC 60 or less 40 or less AC 50 or less Seal material Fluid Air Liquid

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

2 Slide screw 0.05 Without motor brake Series LXF 30 Direct acting guide Ball screw 0.03 80 3 100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table

Single Axis Electric Actuator Series LJ1

2 0.05 Slide screw Without motor brake Series LXF 30 Direct acting guide 0.03 Ball screw 80 3 100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 0.03 Ball screw 6 80 Ball bushing guide 100 0.05 Slide screw 200 2 200 3 0.05 Slide screw 100 4 With motor brake 30 0.03 Ball screw 5 80 100 0.05 Slide screw 200 3 Slide table

High Pressure Coolant Valve

50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148

90

200 When 20 units are used 77% reduction Current model IR3000 Series 91% reduction 38000 yen reduction 150 150 117000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

VFN2000N

Cylinder ports should be NAMUR hole pattern. 100/200 V (50/60 Hz) 24 V 15 to +10% of rated voltage Class B or equivalent 5.0 VA/60 Hz, 5.6 VA/50 Hz 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz 1.8 W Grommet, Grommet terminal, Conduit terminal, DIN terminal Note 1) Use dry-air at low temperature. Note 2) Use turbine oil Class1 (ISO VG32), if lubricated.

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

VNH

50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5

Interface Regulator for VQ4000 5 Port Solenoid Valve

pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow

q"s

.;,1 '"1 , ,"1 20 40 60 Flow rate (l/min (ANR)) a' e 6 E .9 .t 0.0 . 3 o 20 40 60 80 1 Frow rale (l/min (ANa)) Series lTV201n Hysteresis Repeatability Linearity i .9 .g o 25 50 75 100 Inpll signal (%F.S.) 25 50 75 r00 Inputsignal (%F.S.)

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

KT10

1.4 1.75 (44.5) 0.50 (12.7) 0 0.0 0 10 20 30 Flow rate (slpm, N2) 4.30 (109.2) 3.25 (82.6) Clearance For Panel Mounting KT12HF 2000 psig (13.8 MPa) Inlet pressure: 1000 psig (6.9 MPa) 11.0 1600 9.7 1400 Delivery pressure (MPa) Delivery pressure (psig) 8.3 1200 2.97 (75.4) 6.9 1000 800 5.5 2.22 (56.4) 600 4.1 0.28 (7.1) 400 2.8 200 1.4 0 0.0 0 10 20 30 40 50 Flow rate (slpm, N2) 2.80 (71.1

F

~ 140F Ambient and Fluid Temperature 8 ~ 10Turns No Of Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I E S (N)AS2000, 3000 Port Size G H I K A B C D E F Model 1/8 50 54.5 16 4.5 40 30 5 17 10 15.5 (N)AS2000-01 3/4 51.5 56 20 4.5 40 30 5 23 11.5 17 (N)AS2000-02 1/4, 3

ZMA

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

Series 10-MGF ø40, ø63, ø100 Guide Table

P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.