MX-OMP0051

16.5 16.1 8.1 8.1 16.1 16.1 35.1 35.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 22 16 16 23 23 29 48 48 MXQ20(A) 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 22.9 23.9 23.9 23.9 29.9 38.9 63.9 63.9 63.9 MXQ25(A) 34.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

PFxx-OMS0001CN

2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1 42 [F10] [ SUb] [ oUt] 43 [F20] [ inP] 3 [REACUM] 47 4 [ oFF] OFF 48 [F22] [ FrE] [F30] [SAvE] [ oFF] 49 [ PoS] [ HoR] 50 [ PrS] [ Mid] 0.4 MPa0.6 MPa [F31] [F80] [ dSP] OFF [ oN]ON 51 [F81] [ Pin] [ oFF] 52 [F82] [LinE] [*] 53 [F90

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

40 0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

Modular F.R.L. Unit

5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84

Trimmer Auto Switch

(mm) Description/Series Bore size 10 16 20 25 32 40 50 63 80 100 125 Parallel style MHZ2 3.0 5.5 6.5 8.0 7.5 Parallel style MHZJ2 3.0 5.5 6.5 Parallel style MHS2 (2 fingers) 4.0 4.0 * Parallel style MHS3 (3 fingers) 5.0 4.0 * Parallel style MHS4 (4 fingers) 5.0 3.0 * Air Cylinders (mm) Description/Series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Compact cylinder

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.

Sine Rodless Cylinder Series REA

200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

Process Valve

VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Electrical entry: D or DZ only Electrical entry: D or DZ only Coil rated voltage 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 1) Manual override 5 6 Note 1) Non-locking push type Nil A Electrical entry CE-compliant G Non-locking push type

Modular F.R.L. Unit

93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.

0.01

200 150 100 0 50 Supply pressure (kPa) Supply pressure (kPa) 870 Air Catch Sensor Series ISA2 Response Time (Typical example) Response time changes with detection distance and piping length.

3 Port Solenoid Valve Series VQ100 1

VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

VNB

VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Electrical entry G C TNote) D DL Option Electrical entry/With indicator light/ surge voltage suppressor Grommet Conduit Conduit terminal DIN terminal DIN terminal with

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Peltier-type Chiller Thermo-con/ Compact Type

100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

PFxx-OMP0001CN

1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2]

Table of Contents - Tubing

(Example) 10-TFU0425B-2 TFU0425-2-50 (100)-X3 TFU0425-3-50 (100)-X3 TFU0604-2-50 (100)-X3 TFU0604-3-50 (100)-X3 TFU0805-2-50 (100)-X3 TFU0805-3-50 (100)-X3 2 3 2 3 2 3 4 2.5 6 4 8 5 50m or 100m roll B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) TUB-12 Clean Tubing: Polyolefin Tubing How to Order Designed to be used for blow-off and washing

SL5200

psig (0.69 MPa) inlet Inlet pressure: 50 psig (0.34 MPa) inlet 0.97 (24.6) 70 0.48 60 0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-