Exhaust Cleaner for Clean Rooms AMP Series

90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Air Cylinder MGQ Series Compact Guide Cylinder

MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35.. .. ), spacer ol5, 10, 15 20mm wdth wllbe used (EEmple) MGQM5o lO s produced by instaling 15mn spacer in MGQ'!

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

size L type, M type plug connector Valve model Type of actuation DIN terminal Grommet type A, B Single 61 65 88 2 position Double 79 86 132 SY560--01 Rc(PT) 1/8 Closed center 3 position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

PSxx-OMU0002CN

kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p)10 35 mA 2F.S. 1digit(253 ) 0.2F.S.1 digit 2.5F.S.(253 ) 1F.S. 2%F.S.(25) NPN PNP 2 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5 ms (20,100,500,1000,2000,5000 ms ) 0 2 15 V 0.65 V 1 k 420 mA 2.420 mA 12 V 300 24 V 600 50 0.4 V 5 ms -75No.PS-OMU0002CN-D

PSxx-OMU0008CN

0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa -0.1002.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa -0.1052.100 MPa / 0.1 kPa 0.001 MPa 500 kPa 2 MPa 4 MPa DC1224 V10 (p-p)10 35 mA 2F.S. 1digit(253 ) 0.2F.S.1 digit 2.5F.S.(253 ) 1F.S. 3F.S.(25 ) NPN PNP 2 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5 ms (20,100,500,1000,2000,5000 ms ) 2 0 15 V 0.65 V 0.85 V 1 k 420

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 19 Series PF2W For Water Digital Flow Switch to are terminal numbers.

CL

Fine Lock Cylinders Lock-up Cylinder Series CL 16, 20, 25, 32, 40, 50 63, 80, 100, 125, 140, 160 Locking in both directions is possible. Locking in either side of cylinder stroke is possible, too. (The lock-up cylinder can be locked only in one direction.)

0.01

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Standard pressure: 100 kPa Standard pressure: 100 kPa Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.4 0.6 Standard pressure Standard pressure 0.5 mm 0.25 mm Detection distance (mm) Detection distance (mm) 0.5 0.3 0.4 0.2 0.3 0.15 mm 0.15 mm 0.2 0.1 0.1 0.03 mm 0.01 mm 0 0 50 0 250 200 150 100 250

99

0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06

Digital Flow Switches, Series PF2A, Series PF2W

Remote Type Water resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

AC Servo Motor Driver (SSCNET Type)

The guideline is 80% or less. 0100 % 7 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0300 % 8 Peak load ratio The maximum torque is displayed.

Clean Gas Filter

Part No.: SFB100-02X8 002 Part No.: SFB200-02-S -X40 V Specifications Fluid Air Nominal filtration Operating pressure Max. 0.99 MPa Nominal filtration m Note 1) Rated flow rate L/min (ANR) Note 2) Symbol 001 002 005 010 020 040 070 100 Max. operating temperature 80C O-ring 1 2 5 10 20 40 70 100 5 10 15 30 50 80 130 250 Element proof differential pressure Symbol N V T Material NBR FKM PTFE

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Weight (kg) Model 0.51 CHNB20-100 0.63 CHNB25-100 48mm 0.89 CHNB32-100 63mm 1.51 CHNB40-100 Basic type with a 100 mm stroke Series Variations Nominal pressure Series Bore size (mm) Mounting bracket Auto Switch 20 Basic type Axial foot type Front flange type Rear flange type Single clevis type Band mounting type 25 Reed type CHN 7.0MPa 32 Solid state type 40 Features 1 Hydraulic Cylinder

Round Type Hydraulic Cylinder

+ 100 (n 2) (n = 2, 3, 4, 5) D-G39/K39 D-A3/A44 35 + 30 (n 2) (n = 2, 3, 4, 5) 10 35 100 Note 1) Auto switch mounting Auto switches 2 pcs.