High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

Series HAW Water Cooled Aftercooler 1

Therefore, design within the rated water flow range (refer to the model column). 37 37 55 55 75 75 110 110 How to Calculate Outlet Air Temperature Correction Factor by Cooling Water Temperature Air pressure 0.7 MPa Outlet air temperature can be calculated with inlet air temperature, cooling water temperature and amount of air in the following procedure.

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

PSxx-OMM0002CN

(KPa) -111(KPa) () (H1) (H1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) (H_1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) (H1) (H1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) : OUT1 OUT2 "1""2"() P_1 P_2 -26No.PS-OMM0002CN-F [F 2] OUT2 OUT2 OUT1 , <> [F 2] [F 1] OUT1 (2426 ) [F 3] () <> [F 3] [F 3] -27No.PS-OMM0002CN-F [F 4] / / 0 <> [F 4] -28No.PS-OMM0002CN-F [F 4] / 5ms ooo1 C_5 10 ms

PF2A/PF2W

Analog output Current output 4 to 20 mA within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption (No load) 110 mA or less 100 mA or less IP65 Enclosure Operating: 0 to 50C, Stored: 25 to 85C (No condensation or freezing) Operating temperature

Vacuum

Options lvlodel NZFA1OO NZFA2OO Note Single Bracket Ass'y BP-1H BP-1H Manifold brackets (110 stations) zzFAlzzFA2With bracket, bolt, nut, washer. (2 pcs. each) Material Part No. of Element Part No.

Process Pump

(Option) 613 PAF Series Dimensions: Automatically Operated Type (PAF5000 Series) With nut (with LQ1 fittings): PAF5410S-1S19 1S25 204 10 255 120 4 x 9 Reset button Air operated reset port Rc, NPT, G 1/8" 10 AIR SUP Rc, NPT, G 1/4" (270) FLUID OUT With nut 249 A 195 166 157 110 82 51 FLUID IN With nut 18 Silencer: AN20-02 (Option) AIR EXH Rc, NPT, G 1/4" Tube Size Applicable for Nut Size

1

VX021S-1-16FB 12 VDC 100 VAC 110 VAC 200 VAC C18312G6GCU None 220 VAC 230 VAC 240 VAC 24 VAC 48 VAC 24 VDC GDM2A-L5 12 VDC GDM2A-L6 100 VAC GDM2A-L1 110 VAC GDM2A-L1 200 VAC GDM2A-L2 220 VAC GDM2A-L2 230 VAC GDM2A-L2 240 VAC GDM2A-L2 24 VAC GDM2A-L5 48 VAC GDM2A-L15 With light * Select an appropriate DIN connector suitable for the coil insulation type. 7 XSA Series Specific Product Precautions

3 Port Solenoid Valve Rubber Seal Series SY100 1

Diode Surge voltage suppressor LED Indicator light It is in common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC. [Low wattage [0.45 W] is available, too. For details, refer to catalog on page 4-18-4.]

V100

Indicator light LED Can be used for 110 V and 115 VAC, 220 V and 230 VAC in common.

VP4

Effective area (mm2) Port size Weight (kg) Model Type of actuation 3.3 1 1 1 1 1 1 1 120 280 300 120 280 300 110 VP4150 1 4 1 2 Single 9.5 2 position 3 position VP4170 3.8 VP4250 1 4 1 2 Double 10 VP4270 4.4 VP4350 Closed center 4.4 Exhaust center 1 110 VP4450 3-6-2 3 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Use DIN Terminal Precautions 1.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance: AN200 to 500 1 m, AN600 to 700 2 m, AN800 to 900 3 m Tension bolt Sound absorbing material (PE sintered body) Sound absorbing material (PE sintered body) Cover Case Without silencer With silencer Body 130 Hexagonal flats 120 Port size Hexagonal flats 110

Vacuum

Options lvlodel NZFA1OO NZFA2OO Note Single Bracket Ass'y BP-1H BP-1H Manifold brackets (110 stations) zzFAlzzFA2With bracket, bolt, nut, washer. (2 pcs. each) Material Part No. of Element Part No.

VCL

Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Electrical entry G C T TL Grommet Conduit Conduit terminal Conduit terminal with indicator light Clip part no. Note) Indicate the valve model no. as a label will be attached to the clip.

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 110 140 150 150 160 220 210 220 210 220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

(Default settings) Solenoid Specifications Electrical entry DIN terminal (D) DIN terminal (Y) D, Y Coil rated voltage [V] DC 24, 12 AC (50/60 Hz) 100, 110, 200, 220 Allowable voltage fluctuation 10% of rated voltage*2 Power consumption [W] DC Standard 0.35 (With light: 0.45) 100 V 0.78 (With light: 0.87) 110 V [115 V] 0.86 (With light: 0.97) [0.94 (With light: 1.07)] Apparent

100

. * There is no S option for AC voltage valves because the generation of surge voltage is prevented by a rectifier. u Manual override H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector Nil Non-locking push type D Push-turn locking slotted type AC (50/60 Hz) CE-compliant 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] * LN and

CE2

12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25 162 64 430 133 150 36 13.5 116 25 180 18 58 92 139.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 20Mounting Bracket Part No