Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.

Title not found

Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.

Air Fittings Fitting Series For Special Environment

N L1 L2 Port B min. port size L3 L4 L5 L6 D P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 80 10 6 6 10 40 47 23.3 13 19.5 33.5 23.5 33 13.5 19 22 8.5 10 106 6 89 10 120 55 73 53 55 KRM11-08-12-10 KRM11-08-12-6 8 12 25.7 15.5 22.5 37.5 26 36.5 20.5 24 10 11.5 14.7 86 74 KRM12 Weight (g) Applicable tube O.D.(mm) Thread Rc(PT) H (Hex.) Port B min. port size Part No.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

IDX-OM-W017

L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Sine Rodless Cylinder Series REBR Direct Mount Type

44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15

Title not found

Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1

Title not found

Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

KT10

) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.

76

The amount of moisture is 3.0 g/m3. 10.

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

AC Servo Motor Driver (CC-Link Type)

Approx. 5.6k Switch DICOM 24VDC 10% 150mA Approx. 5mA VCES 1.0V ICEO 100 A (2) Digital output interface DO-1 A maximum of 2.6V voltage drop occurs in the driver. If polarity of diode is reversed, servo amplifier will fail. Servo amplifier Driver driver ALM, etc. Load DOCOM (Note) 24VDC 10% 150mA Note.