E-P HYREG

VEX1-17 1 pc. 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 Note 1) 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 Piping thread type 2 Common external pilot 8 2 8 stations Nil Rc G Note 2) A B C 3 8 1 4 2 stations 1 F N Internal pilot 0 1 For VY140 4 3 8 NPTF NPT 2 Common external pilot T 6 3 8 1 2 6 stations VY manifold pilot type Body size B, 2 Note 1) In the case

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

IDX-OM-W017

their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-2 i-2 . i-3 i-2-1 . i-3 i-2-2 . i-4 i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

IDX-OM-W020

and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3

HRL

One compressor controls 2 channels which realize the independent temperature control of 2 systems.

OMR0032

Ensure an interval of 2 msec or more is allowed between input signals, and maintain the signal state for at least 2 msec.

3 Port Solenoid Valve Metal Seal Series VZ200 1

voltage suppressor Pg7 Applicable cable O.D. 3.5 to 7 2-2.8 mounting hole With light/surge voltage suppressor 2-2.8 mounting hole 56 48.6 23 17.3 20 1 2 M plug connector: VZ2 2-M (Z)-M5 8.8 13.7 3.5 Max.10 78 With light/surge voltage suppressor 2-2.8 mounting hole 4-15-5 6 Series VZ200 Dimensions: Sub-plate Mounted 1 2 Grommet: VZ2 5-G H (S)-01 Manual override (Non-locking) 2-4.5 mounting

2–4

A B C D A B C D Bore size (mm) Port aperture A 12 (1) (1) (1) 16 (2) (2) (2) B D 20 (2) (2) (2) View from piston rod end 25 (2) (2) (2) 32 C (2) 40 (2) 50 (2) Operating Range Auto Switch Mounting Bracket/Part No. (mm) Reed switch Solid state switch Applicable switch Auto switch model Bore size Bore size (mm) Mounting bracket part no.

125

Manifold base Port 2(A) side Port 2(A) side Internal pilot Common external pilot + + + + Blanking plate assembly VVEX2-2 (Common external pilot) Exhaust from both ends when there are 5 stations or more. 2 x M5 Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P):

VM

(2 position) Twist Selector (3 position) Foot Pedal Push-Pull P3.5-7 P.3.5-11 P3.5-19 Effective Area (Cv) Number of Ports 1 (0.055) 2, 3 Poppet 2.5 (0.14) 2, 3 19 (1) 2, 3 Poppet Poppet Function 3.5-1 Series VM Mechanical Valve SlA VlA VM400 VZM500 VZM400 VFM300 VFM200 VM800 21 X 35 X 53 18 X 28 X 87 18 X 30 X 91 26 X 35 X 94 23 X 40 X 115 30 X 40 X 57 SlA VlA VM/VR VH Roller Lever Adjustable

High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

3 Port Air Operated Valve

-41 Common EXH 1(P) port 1/2 3(R) port 1/2 2(A) port 1/2 2 to 20 stations VPA700 VV3PA7-42 Individual EXH 1(P) port 1/2 2(A) port 1/2 3(R) port 1/2 Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more. 1557 3 Port/Air Operated Valve Body Ported/Single Unit How to Order VPA300/500/700 Series VPA 3 4 2 1 01 A Series 3 5 7 VPA300 series VPA300

VEX1

1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

energy saving effect

2 6 Circulating fluid outlet 1 Users equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 2 8 7 Water-cooled refrigeration Facility water inlet 1 Facility water equipment 7 2 Facility water outlet * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.

IDU/IDF

Note 2) This is made to order.

Tamper Proof and Flat Head Screw

24 27.5 R 1/2 AS420-F04-SD PF1/2 28.5 12.4 38.5 63.8 26.7 1.2 55.8 AS420-N04-SD NPT1/2 23.8 NPT1/2 Reference dimension for threads after installation SMC Pneumatics, Inc. 27 World Wide Support...

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !