CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

VM

One way roller lever VM123-M5-02 VM133-M5-02 VM123-M5-02S VM133-M5-02S JIS Symbol 2 port Polyacetal or hard steel roller R port (3 port only) 3 port 0.5 MPa supply 2-M5 x 0.8 depth 4 3.2 mm P.T. 10 N F.O.F. 2-4.6 mounting hole 2.3 mm O.T. 5.5 mm T.T.

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV F G H J K L M O1 25 15 to 100 130.5 116 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range (mm)

MK

Note 2) Dimensions E and F are 7 mm longer for the auto switches with connector (D-A7lC, A80C, J79C).

Compact 5-Port Solenoid Valve

B) port side: Yellow (Light/surge voltage suppressor) DIN rail holding screw (For DIN rail mounting) 141.3 (8) Plug-in Common Dimensions Made to Order Manifold Exploded View (8) (5.5) A B A B A B A B 4 A 4 A 4 A 4 A 97.5 80 31.8 128.8 96.6 (35) (77.1) B 2 B 2 B 2 B 2 26.3 5.5 1.8 2 x M5 Mounting hole 4 x M5 Mounting hole (15.8) (16.7) (Recommended tightening torque: 2.9 N.m) (Recommended

4/5 Port Air Operated Valve SYJA3000 Series

Note 3) Model No. for 5 port base mounted type without sub-plate is SYJA540. 1478 4/5 Port Air Operated Valve SYJA5000 Series Dimensions/Body Ported Dimensions/Base Mounted 2 position single: SYJA5120-M5(-F) 2 position single: SYJA5140-01 41.5 2 x 4.3 (For mounting) 19.5 M5 x 0.8 (Pilot port) 37.5 4 M5 x 0.8 (Pilot port) 11 B A 5 16 A B SYA 1 1 24 10 2 x 2.6 (For manifold mounting) M5 x 0.8

Vacuum System Peripherals:

x 0.8 , ZY 1 8 1 4 SYJ300/500/700 Vol. 4 0.41 to 2.8 ZQ 3 port solenoid valve Series VZ Compact size: 15 mm (VZ100/200/300) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol

Fieldbus System

-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MA 7.1 14.4 8 CX 8.5 11 D20.3 24 -X 25 20Data A 20 19 1.5 Piping port 2-M5 x 0.8 (Plug: M-5P) 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5

4/5 Port Air Operated Valve Series SYJA3000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

New

B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

5 Port Solenoid Valve SY Series

-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7

CQS

Basic style (Through-hole/Both ends tapped common): CQSK/CDQSK 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2-OB counterbore H thread effective depth C 2-M5 x 0.8 2 x 2-OA effective depth RA Note) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-N through

RSQ

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 43.5 61 17.5 25 RHC RSQB 16 20 Bore size: 16, 20 4-O counterbore 2-N through E MK(2) Stroke Q 2-P F Y RS Q G RS H A T D RZQ W U MI W S 20 (22) V M 10 (11) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Note 2) Use 1/8" tube. Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.