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2 2 2.5 3 Q 11 12 14 17 20 VB 4 4 5 6 6 UB 10 10 12 16 16 ZA VA TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Voltage symbol 24 VN 12 VN 100 VN 200 VN 110 VN 220 VN Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Lead wire length of 2000 mm SY3120-5LOZ-M5 SY100-68-A-20 2> Lead wire length of 300 mm (standard) SY3120-5LPZ-M5 Circuit Diagram with Light AC circuit

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piping port M5 x 0.8 (or M6 x 1) ZP ZCU AMJ 2-3.3 Mounting hole Misc.

CATALOG

12 x 2 16 x 2 20 x 2 25 x 2 11 or equivalent 17 or equivalent 22.6 or equivalent 28.3 or equivalent 35 or equivalent Port Size M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

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Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

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depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10

ZP

to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

ZP

across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 (14.5) (15) 6.5 7 0.8 1.2 2 2 6 8 6.7 8.8 ZP2-TB10MU-B5 ZP2-TB15MU-B5 M5 x 0.8 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 8 7 (16) (15) 2 2 2 1.2 10 15 15.6 10.6 4 Symbol/Type Short-type Pad EU: Flat 2, 4, 6, 8, 15 Pad diameter Space-saving in the height direction How

Air Fittings & Tubing

<M5> (1) (2) Tube O.D.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Vacuum Pad

to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square

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2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-S41-M5 Type 10-SS5YJ3-S41-C4 Type 10-SS5YJ3-46-M5 Type 10-SS5YJ3-46-C4 1/8 M5 x 0.8 10-SYJ343 Type 10-SS5YJ3-S46-M5 Type 10-SS5YJ3-S46-C4 Note) The values are for individually operated 2 position type manifold bases.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 4-OA effective depth RA 2 x 4-OB counterbore depth RB 2-M5 x 0.8 HN I 4-N through HR 1 D M E End Lock Mechanism Dimensions Flat washer Bore size (mm) HN (Max.)

ZP

Vacuum Inlet Direction Lateral Y Type/ZPY Connection Male thread Female thread Pad diameter 2 to 16 20 to 32 40, 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 Vacuum inlet Barb fitting2 4, 6 6 4, 6 6 1 Refer to 2 to 8 for the thin flat type and thin flat type with ribs. 2 Applicable

CRB2/CRBU2/CRB1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x 0.8 with depth 10 56 3-M5 x 0.8 with depth 16 25 25 A port B port 5.5 with depth M5 x 0.8 with depth 16 11.5 10g6 0.005 0.014 2 20 0 0.030 4 Vane type 6.5 10 30 45 Single