Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ8, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ10, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired Standards

Model: VDW40, Voltage: 24VDC, Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4.5 mm, Port Connection Type: One-touch fitting for ø8, Body Material and Coil Insulation Type: PPS Body, FKM Seal, Class B Coil, Option: None

Model: VDW40, Voltage: 24VDC, Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4.5 mm, Port Connection Type: One-touch fitting for ø8, Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: Bottom Mounting Insert Type

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4 (4.5 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: A (PPS Body, FKM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4 (4.5 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: N (Bottom Mounting Insert Type)

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C10 (One-touch fitting for ø10), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: A (PPS Body, FKM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: K (With 2 Quick Fastener Clips)

VFR

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

Vacuum System Peripherals:

17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 4 VSA440 3 4 , 1 2 3 4 1 2 standard 1 2 3 4 , Piping specifications/Side ported, bottom ported Type V Port size Rc EXH port Valve size Applicable valve Manifold base size Rc P EA, EB A, B , 1 4 3 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 1 2 1 2 VSA420 Common EXH , 3 8 1 2 , 1 4 3 8 , 3 8 1 2 , 3 8 1 2 3 8 standard

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

center SMC 5 3 position pressure center Dual body type (double/3 position) Pilot type Internal pilot External pilot Nil R Manifold SS5Y3-45GD-05U-C6 Rated voltage SS5Y3-45GD-05U-C6 . 1 set (manifold part number) SY3140-5FU . 3 sets (single solenoid part number) SY3245-5FU . 1 set (double solenoid part number) 5 24VDC Manual override Nil Non-locking push type D E Slotted locking type Knob

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

42 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20 P=20 19.5 1 23 9 Station D side 50 29.5 75.5 300 3.8 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 64 62 11.5 R P 29.5 34 3 1 PE port 2-Rc(PT)3/8 P(SUP) port M5 X 0.8 External

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible