F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Long strokes Rc(PT) BQ Plug with breathing hole BC element M GA T 4-J Width across flats KA 2-Rc(PT) P Cylinder port G G Rc(PT) BP Unlocking port GL GR GB 4-FD FA MM Q FY BF D EA RY E V FT VA AL A K F BN N N RT M C B FX FZ H S + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BF
Rc Nil NPTF T G F 1 By mounting individual EXH spacers on a manifold block, exhaust ports can be provided individually for each valve. (3, 5 common exhaust type) 2 4 1 2 4 5 3 3' 5 3 3-10-30 31 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Reverse pressure spacer AXT519-19A1 Main EXH back pressure check plate AXT512-25A Thread type Rc Nil NPTF T G F In cases where
81 g 85 g 43 g C3602 (electroless nickel plating) O-ring: HNBR Piping port Including lead wire with connector (3 cores, 2 m) 70 g 74 g 32 g 71 g 75 g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g Weight Including lead wire with connector (4 cores, 2 m) Excluding lead wire with connector Option/Part No.
M8 connector Cable length For connector cable of M8 connector, refer to page 90. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 4 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override
M8 connector Cable length For connector cable of M8 connector, refer to page 1-5-78. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 1-5-7 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual
R V2 V1 Q1 Q21 Q1 C Y300T-D U E G Maintenance space 1 Q2 (Sizes 20, 40) Q1 (Size 30) AM30-03-D AMK30-03-D AMD30-03-D Standard specifications Optional specifications Bracket mount P A C E F G J M N Q1 Q2 R S U V1 V2 components Number of Model Size 20 2 1/8, 1/4 83.2 17.5 41.6 25 21 30 24 33 5.5 11.5 3.5 29 38 3 126.4 43.2 Size 30 2 1/4, 3/8 110.2 21.5 30 55.1 35 26.5 41 35 7 14 6 42.5
/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8
Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -
5 3 4 5 G H Built-in one-touch fitting: SYJ5 20G H C4, N3 C6, N7 Grommet (G), (H): SYJ5 20-M5 G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2 [107.6] 44.2 [46.4] 36.9 22.1 44.2 [46.4] 3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage
Class Stainless steel, NBR O-ring t y u t y u FKM, EPDM, PTFE FKM, EPDM, PTFE NBR O-ring NBR Return spring Stainless steel Return spring Stainless steel Body Stainless steel Brass Stainless steel Body Brass Dimensions: Bracket A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size Bracket part no.
direction (B) 24 84 (Plug: M-5P) Operating direction (B) (A) 7 10 13 10 13 6.5 A 14.8 30 7 24 A 15.8 Z 3 Cross section AA (N-1) x H G H 6 depth 4.5 5H9 +0.030 Bottom through-hole 3.3 NN-M4 x 0.7 thread depth 8 0 5H9 +0.030 depth 4.5 0 F E (mm) Model Z E F G H N J MXW8-25 157 55 48 47 32 3 64 MXW8-50 182 53 76 46 30 4 71 Note) Adjuster bolt (Y) shown in the section above is attached only
<> [F 2] [OFF] [Err] 3 -31No.PS-OMM0006CN-E 24 [P_2] [n_2] "P""n" [P_2] [P2L][P2H] [F 2] OUT2 1 2 2 3Err[F 2]Er23Err 4OUT2OFFOFF -32No.PS-OMM0006CN-E [F 3] <> [F 3] [F 3] -33No.PS-OMM0006CN-E [F 4] <> [F 4] [F 4] -34No.PS-OMM0006CN-E OUT1 AP1 (OUT1AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2AP2 1) OUT2 OUT2OUT1OUT2 A2LA2H (A2L 1) P_2H_2
40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal
For pipe thread type F , a G thread conversion fitting set is included.
/set, with 4 bolts) The mounting holes on the top and on the side are interchangeable as standard. G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !
5 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4
3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override
Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t
Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t